ET6308™

The FirstNano ET6308 is a compact, multi-tube horizontal furnace system designed for research and development and pilot production environments. It is a configurable multi-stack system that builds on over two decades of industry use. The system is engineered for a wide array of thermal processes, including wet/dry oxidation, atmospheric and low-pressure annealing, dopant diffusion, and the deposition of various thin films such as polysilicon (doped and undoped), silicon nitride, and LTO silicon dioxide. It features precise temperature control and options for configurable precursor gas management and effluent gas abatement.