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Product Overview
Vmicro has a long term experience of microfabrication engineering with design rules from 100 nm to 100 µm.
We are able to offer advanced lithography processes using e-beam and optical techniques.
Optical lithography from 1 µm to 100µm
E-beam lithography from 50 nm to 1µm
Fast prototyping with e-beam lithography on large areas
Wide range of resists: DUV, PMMA, Az nLOF, HSQ
Proximity correction for dense patterns generation with 100kV ebeam
Lithography sequences combining high resolution to thick resists. Mask engineering for deep etching of small structures
Product Description
Vmicro has a long term experience of microfabrication engineering with design rules from 100 nm to 100 µm.
We are able to offer advanced lithography processes using e-beam and optical techniques.
Optical lithography from 1 µm to 100µm
E-beam lithography from 50 nm to 1µm
Fast prototyping with e-beam lithography on large areas
Wide range of resists: DUV, PMMA, Az nLOF, HSQ
Proximity correction for dense patterns generation with 100kV ebeam
Lithography sequences combining high resolution to thick resists. Mask engineering for deep etching of small structures
Product Videos
Vmicro
Vmicro is a microfabrication company specializing in advanced technologies such as AFM probes and microfabrication services. They cater to customers in the technology and research sectors, providing expertise in lithography, etching, and thin film processing. Their collaborations with institutions like CNRS highlight their role in supporting research and development in micro and nanotechnology.
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