Thin film profile milling

Load Lock Etch System

4Wave

The 4Wave Load Lock Etch System is a Flagship product addressing several significant markets. This system boasts high performance etching, critical thin film profile milling, glancing angle milling, etc.Markets:Semi-ConductorData StorageMEMSWafer processing servicesApplications:Delayering (Failure Analysis)Patterned EtchFeatures:12cm & 22cm Gridded RF Ion Sources3 x 8? target carousel300mm diameter process surface Deposition Uniformity RepeatabilitySubstrate plasma pre-cleaningSingle Platten Load Locked StageMulti substrate fixturing> 500 hrs MTBF