Hydrogen Chloride (HCl) Etching System
CVD Equipment Corporation
CVD Equipment Corporation's Hydrogen Chloride (HCl) Dry Etching System is an automatically controlled production unit for Hydrogen Chloride Etching or Vacuum Baking of susceptors to pre-condition and remove deposits. The system is capable of operating at temperatures > 1200 °C with hydrogen and hydrogen chloride. The system is used to support LED manufacturing in cleaning the graphite susceptors and quartz used in MOCVD and VPE systems.