AJA International, Inc. has developed and manufactured a wide variety of cooled substrate holders for situations where substrates need to be actively cooled or be kept at limited temperatures.These range from LN2 reservoir to LN2 drip to water cooled versions depending on the application. Custom, backside He gas cooled models are available for ion milling or sputter down configurations. Special cryogenic cold-finger models have also been built although these do not permit substrate rotation.Sizes from 1" to 300mm Ø are available. RF (or DC) biasing is possible for some designs.
