By AMT&C Group (Advanced Magnetic Technologies & Consulting Group)
Production-oriented MBE system with robotic cluster tool for CdHgTe growth Two-chamber MBE system for CdHgTe, as well as transition metal dichalcogenides (TMDs) growth. System's parts for operating CdHgTe materials, including mercury catch and disposal systems, developed and tested by Russian Academy of Sience. Substrate transfer provided by UHV robotic cluster tool. System capacity - 1×Ø100 mm - 1×Ø150 mm Ultimate pressure - 5x10-11 Torr Hg source of special design - Available Hg catch system - Available Special pumping system with cryo shields for CdHgTe growth chamber - Available In-situ monitoring system - RHEED, RGA, BFM, OFM, IR-pyrometer
Materials: H2 Advantages: - Low energy consumption - Absence of high-energy particles and ions - Integrated water cooling Technical characteristics Thermocouple: Type C Bakeout temperature: 200°С Operating temperature: 2000°С In-vacuum length: 190-400 mm In-vacuum diameter: 36 mm Mounting flange: 40CF
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Materials: N2, H2, SiH4 ADVANTAGES: - PBN ionization chamber - Integrated matching device - Inductive plasma Technical characteristics - Input power: 50-400 W - In-vacuum length: 292 mm - Mounting flange: 63/100CF
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Counter-rotating vane set provides for linear control across the entire operating range of the valve. The precise setting of vane rotation of the plates is realized due to the servo-based flap control system.
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