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Lithography & NanopatterningFabrication & Surface Engineering

Inductively Coupled Plasma (ICP) Etching Systems

By SAMCO Inc.

Samco’s Inductively Coupled Plasma (ICP) etching systems deliver high-density plasma solutions tailored to meet the unique process requirements of both research and production environments. Our reliable, durable and compact ICP etching systems allows you to handle a variety of materials including III-V compound semiconductors (GaN, GaAs, InP), silicon, SiC, quartz, glass, dielectrics, and metals.