Introduction The refractory metals, defined by their high melting points, are useful for their resistance to heat, wear, and corrosion. They maintain their performance at high temperatures. If one wants to combine these properties with low electrical resistivity and low cost, Tungsten (W), Molybdenum (Mo), and Tantalum (Ta) are top choices. Book values for bulk resistivity are shown in the table below. However, achieving resistivity close to bulk values can be difficult. The goal of this application note is to give some reference information and process recipes for depositing these materials.
