By LayTec GmbH
† The algorithm is also closely related to the "Oscillation Period" which is an even more simplistic but fast fit which merely determines the period time of one full oscillation as well as the number of such oscillations within the selected layer. Both fits rely on a purely (potentially damped) sinusoidal oscillation behavior. Fig. 3: Analysis screen of EpiNet® applying the "Oscillation Period" fit allowing for determining the oscillation period and the number of oscillations within the selected step based on a damped sinusoidal fit. Note that the fit was exclusively applied to the process step marked in red. Fig. 4: Results window displaying the values for the oscillation period and the number of oscillations within the process step determined based on a damped sinusoidal fit. † The most simplistic "Oscillation Period" fit is usually a suitable first step for approaching the analysis of new materials of unknown n and k in order to verify whether a "well-behaved" (i.e. damped sinusoidal) growth behavior is applicable for a given layer.
