SUPERIOR THIN-FILM PZT FROM MEMS INFINITY - sputter-deposited above 500 ℃ - polycrystalline PZT films with high d31 piezoelectric response suited for actuators - epitaxial PZT films with low εr dielectric constant suited for transducers and sensors CHARACTERISTICS AMFitzgerald MEMS Infinity Type PZT composition εr -d31 FOM( ∝(𝑑 𝑑 31 2 )/ εr )* tan d Stress (tensile) Wafer type Wafer size PZT thickness MPB 900 240pm/V 40GPa <0.03 30MPa <5 μm Poly-PZT Epi-PZT Ti rich 235 139pm/V 52GPa MPB 354 170pm/V 52GPa <0.03 200MPa 2 μm Bulk Si or SOI 150 mm or 200 mm Poly PZT Epi PZT * Figure of Merit for Transducer P–E Hysteresis Butterfly Curve
