By LayTec GmbH
Algo name: The "Oscillation-based Growth Rate" Short description: † In contrast to the "NKR adv virtual layer fit" and the "NKR Fit on substrate/calibration-layer-corrected reflectance" algorithm, the "Oscillation-based Growth Rate" fit makes use of the known refractive index n and the extinction coefficient k to deduce the growth rate r during epitaxial growth from reflectance transients obtained by LayTec's EpiTT and EpiCurve® TT. † It is fit a convenient way to check whether a thick layer (multiple full oscillations within the respective growth step) grows in an "well-behaved" and expected manner, i.e. at a constant growth rate and with known n and k from EpiNet's database. † The algorithm is also closely related to the "Oscillation Period" which is an even more simplistic but fast fit which merely determines the period time of one full oscillation as well as the number of such oscillations within the selected layer. Both fits rely on a purely (potentially damped) sinusoidal oscillation behavior. Usage Ideas and Alternatives: † The "Oscillation-based Growth Rate" fit is suitable for thick layers of known materials and a sinusoidal reflectance transient. † It is usually a good choice for quickly verifying whether reasonable results are obtained for a well-known growth process. Here, in particularly the appropriateness of the material parameters n and k are tested for consistence. † For detailed growth rate analyses or even unknown materials properties the NKR adv Virtual Layer Fit is usually a better alternative. † The most simplistic "Oscillation Period" fit is usually a suitable first step for approaching the analysis of new materials of unknown n and k in order to verify whether a "well-behaved" (i.e. damped sinusoidal) growth behavior is applicable for a given layer.
