By LayTec GmbH
This white paper introduces a transformative approach to managing and accessing data from LayTec’s metrology systems – EpiTT, EpiCurve ® TT, and Pyro 400 – by implementing a centralized SQL database and adopting floating network licenses. These Innovations aim to overcome long-standing challenges in data accessibility, security, and software licensing, enabling fab-wide data availability, streamlined analysis, and enhanced operational flexibility. LayTec proposes a two-pronged solution. The first component is the implementation of a centralized SQL database that aggregates data from all LayTec measurement systems. This database, hosted on Microsoft SQL Server 2022, provides a single point of truth for all metrology data, enabling seamless access and analy-sis across the network. With SSD storage and a high-speed 100 Gbit network, the system is designed for performance and scalability. LayTec supplies all necessary scripts and tools for deployment, including job automation and rep-lication configurations. The database is created using the DB-Installer included in the EpiNet ® installation, and replication jobs can be customized per system to ensure efficient data synchronization. The second component is the adoption of floating network licenses for EpiNet ®. Instead of relying on physical dongles, licenses are managed centrally and can be accessed by any authorized user within the network. This approach not only eliminates the logistical issues associated with dongles but also allows users to run the latest version of EpiNet ® on their office laptops or desktops. The license server is ideally hosted on the customer’s existing IT infra-structure – many already operate a Sentinel server, which can be leveraged for this purpose. LayTec provides the necessary drivers and configuration files, and licenses are issued annually based on the number of LayTec tools at the customer site. While the number of seats is techni-cally limited, it is set high enough to ensure full operational flexibility. Floating network license The floating license model replaces traditional hardware dongles with a centralized license server, allowing users to access EpiNet ® software from any authorized device within the network. LayTec provides all necessary drivers and configuration files to facilitate setup. The customer simply submits a fingerprint file of the designated server, and LayTec returns the activation and license files. Licensing is issued on an annual basis and is tailored to the size of the customer’s fabrication facility. The model is based on the number of LayTec tools installed at the site, with customers providing a disclosure of their tool inven-tory. Each year, customers are asked to update LayTec with a list of serial numbers for their installed tools to ensure the license remains aligned with their current setup. Central SQL database The second pillar of the solution is the deployment of a centralized SQL database that aggregates data from all LayTec measurement systems. This database serves as the single point of truth for all metrology data, enabling seamless access, analysis, and backup. To implement this system, the customer must provide a server environment that meets several technical require-ments. Microsoft SQL Server 2022 with SQL Server Integration Services (SSIS) must be installed, along with SQL Server Management Studio 19. The server should be equipped with approximately 1TB of storage capacity per connected measurement system. A high-speed 100 Gbit network connection is also recommended to ensure smooth data replication and access. Licensing for the SQL Server should include both the Standard Server license and the appropriate Client Access Licenses (CALs). LayTec supplies a complete set of tools for setting up the EpiNet ® Database Replication Solution. These include scripts and deployment files such as CreateAgentJob. sql, DeploySSISDB.ps1, DeploySSISSolution.cmd, and the EpiNet ® DWH ETL.ispac package. Using the DBInstaller included in the EpiNet ® installation directory, the database – named EpiNetDWH – is created and configured. A global job is scheduled to run hourly, with additional customiza-tion available for each individual measurement system. The replication process includes a cool-off period and can be enabled or disabled depending on whether a measure-ment run is active. Data replication from all Measurement Process Computers (MPCs) to the central database is handled using standard SQL tools and infrastructure. This setup allows for high levels of customization, including the definition of specific replication jobs and timing – typically configured to run after each measurement cycle completes. Coordination with the customer’s IT department is essential to ensure secure and efficient access to the MPCs and to configure the necessary permissions and network settings. Importantly, LayTec does not charge a license fee for the central database itself. Only service hours are billed when LayTec provides assistance with the setup or customiza-tion of the system. Advantages of the new system – Enables data access and analysis from any network- connected location, including personal laptops – Eliminates the need for cleanroom access to retrieve or analyze data – Reduces reliance on hardware dongles, lowering the risk of loss or damage – Supports the use of the latest EpiNet ® versions without affecting production tool qualification – Centralizes data storage, ensuring consistency and integrity – Provides automated backups to protect against data loss – Prepares the infrastructure for future connected metrology platforms (e.g., EpiX ®, TRIton ®) – Offers a scalable solution that grows with the customer’s tool set and data needs