By SAMCO Inc.
Samco offers high-precision, high-speed processing of III-V compound semiconductors, including GaN, GaAs, InP, and advanced quaternary materials. With a deep foundation in plasma processing technology and decades of industry experience, our etching systems are trusted by customers worldwide for demanding applications, from laser diodes to RF devices and microLED displays. Designed to address specific III-V material challenges, Samco’s systems combine innovative design elements—such as the Tornado ICP Coil®—with advanced vacuum configurations that optimize etchant species distribution, reduce byproduct redeposition, and ensure stable plasma conditions even at low pressures. Our team works closely with each customer to develop customized etch recipes and optimize process performance, providing not only leading-edge equipment but also robust technical support that adapts to the evolving needs of compound semiconductor fabrication.
