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Equipment ServicesInfrastructure & Training

Feed Forward Control

By Integrated Dynamics Engineering GmbH

IDE Leads In Feed Forward Control IDE pioneered the development of Feedforward control-where disturbing signals are recognized and intercepted prior to their influence on the system. IDE first implemented dynamic Feedforward concepts using floor motion sensors known as Floor Feedforward sensors. The use of this feature provides unique low frequency isolation in the range of 1–10 Hz. Applying Feedforward control to systems with XY- stages cancels the effects of the stage forces on the isolated payload. Combined with our Opticon family of high-speed digital controllers the interface between the host stage controller and the IDE system controller is seamless. Settling time after stage movement is virtually eliminated and the overall residual payload motion is greatly reduced.