NW
Lithography & NanopatterningFabrication & Surface Engineering

Ion Beam Etching (IBE) / Ion Beam Milling (IBM)

By Intlvac

Ion Beam Etching is a highly controlled physical sputtering process in which energetic ions are directed toward a substrate to achieve precise, anisotropic material removal. The broad, collimated ion beam ensures excellent uniformity across the substrate surface, while programmable substrate motion further enhances process consistency. The result is repeatable, chemistry-independent etching suitable for advanced thin film patterning and precision component fabrication. Other Systems - Nanoquest I - Nanoquest III - Nanoquest Pico