By Ultrasonic Systems, Inc. (USI)
Significant improvements in coating deposition control can be achieved with advanced ultrasonic coating technology that provides precise control of film thickness for the application of photoresist to various kinds of substrates. Spray coating for the application of photoresist to these non-standard substrates has proven to be a viable alternative to spin coating. An automated method for the precise application of photoresists has been developed that utilizes a "nozzle-less" ultrasonic spray head, a precision liquid delivery system with a high performance X-Y-Z motion control platform. This "nozzle-less" ultrasonic spray technology is widely used for applying various coatings across multiple industrial markets. The combination of the nozzle-free Ultra-Spray head, a precision, liquid delivery system and the versatile Prism X-Y-Z motion and positioning platform provides the capability to meet these increasingly challenging requirements.
