By Melbourne Centre for Nanofabrication
Thermal Scanning Probe Lithography is a direct-write lithography process that uses a thermal cantilever. The cantilever tip, heated to 1000ºC, sublimates local PPA resist. The same tip also provides in-situ AFM, providing real time characterisation. Thermal Scanning Probe Lithography's rapid 3D nanofabrication is used for nanostructures with nanophotonics, nanooptics, nanoelectronics, and plasmonics applications. MCN houses the NanoFrazor Explore, which provides sub-15nm resolution and 3D resolution less than 2nm.
