NW
Lithography & NanopatterningFabrication & Surface Engineering

Silicon Atomic Layer Etching

By SAMCO Inc.

Atomic Layer Etching (ALE) of silicon enables precise material removal with unparalleled surface smoothness and dimensional accuracy. This controlled process is ideal for applications requiring atomic-level precision, such as advanced semiconductor devices, MEMS, and photonic components. With its potential for low-damage etching and high selectivity, ALE of silicon opens pathways for innovations in next-generation microelectronics and nanoscale devices.