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DTCO FinFET N7 Reliability Post Minimos BTI – Application Example

By Global TCAD Solutions (GTS)

In this example, the compact-physics simulator Comphy is integrated in a TCAD flow to simulate the reliability of FETs under 10 years of AC operation. The full accuracy of 3D TCAD is maintained for the efficient calculations of the transient charging and discharging of the defects in the oxides and at the interfaces. Project Name: DTCO_FinFET_N7_Reliability_Post_Minimos_BTI PDF revision of 18 June 2026 Download document only (PDF) Document, read in your PDF viewer; 1 MB Download project (data + PDF) Simulation files for GTS Framework; 153 MB