MML is investigating the fundamental physics that enhances performance of resonant vibratory devices and hybrid photonic/vibratory systems, including higher-order elastic constants and thermoelastic damping. We investigate fundamental behavior at the material's device level, and through new designs based on those principles, enhances real-world device performance. Developing advancements in fabrication processes is also critical to device performance. We continuously push the state of the art in quartz and silicon etching and device integration to continue driving these systems to minimum size, weight, and power without compromising system-level performance.
