Park Systems

Park Systems is a global leader in nanoscale microscopy and metrology solutions, dedicated to empowering scientists, engineers, and industries to push the boundaries of innovation. Built on a pioneering legacy in atomic force microscopy (AFM), the company has grown into the world’s #1 AFM provider and now offers a diversified portfolio that includes imaging spectroscopic ellipsometry (ISE), nanoscale IR spectrometers (AFM-IR), white light interferometry (WLI), active vibration isolation (AVI), and digital holographic microscopy (DHM). With headquarters in Korea, 16 global offices, and a trusted customer base of leading universities, national labs, and semiconductor fabs, Park Systems is shaping—and expanding—the future of nanometrology. Our Nanometrology Solutions Park Systems is committed to delivering metrology solutions that bridge scientific discovery and industrial application. Our technologies combine sub-nanometer scale precision with automation, throughput, and reliability to meet the demands of both cutting-edge research and large-scale semiconductor production. Through continuous innovation and strategic acquisitions such as Accurion (Imaging Spectroscopic Ellipsometry & Active Vibration Isolation) and Lyncée Tec (Digital Holographic Microscopy), we have built the industry’s most comprehensive nanometrology portfolio. These solutions empower customers across semiconductors, advanced packaging, materials science, energy, and life sciences to accelerate breakthroughs and achieve lasting success.