Garching, 9 November 2026. SUSS MicroTec SE has introduced the ASC9500 photomask cleaning system. The company said the new system brings its cleaning technologies to mature-node photomask manufacturing. The ASC9500 is available now and manufacturing has begun.
Depending on configuration, the ASC9500 addresses technology nodes between 38 and 90 nanometers. The platform is based on the ASC5500 photomask cleaning system and introduces an extendable architecture. SUSS said the new generation integrates features previously available only in its high-end cleaning systems. It also offers a next-generation option for customers using the manual HMx cleaning systems.
The system includes integrated acid-free in-situ UV cleaning technology. According to SUSS, this reduces chemical consumption and lowers operating costs. The company said the design lets customers adapt the system to changing process requirements while maintaining cost-efficient operation.
SUSS said demand for semiconductors at mature technology nodes remains strong. These processes are used in automotive, industrial electronics, power semiconductors and advanced packaging applications. The company said growing production volumes increase demand for photomasks and related process solutions.
"The semiconductor market is becoming increasingly diverse, and mature-node manufacturing requires both greater production capacity and process flexibility. With the ASC9500, we are renewing a well-proven cleaning platform and introducing an extendable solution designed to address evolving customer requirements. We already see demand from multiple customers and have started manufacturing. The ASC9500 reinforces our commitment to supporting a broad range of photomask applications and strengthens our position in the photomask cleaning market," said Yuta Nagai, Senior Vice President Photomask Solutions at SUSS.
Together with the APB9500 post-exposure bake solution, the ASC9500 expands SUSS' ASx9500 platform into an offering for photomask processing. SUSS said it has identified requirements from multiple customers for the ASC9500. The company will hold product deep dives at SEMICON Europa.
Source: SUSS MicroTec SE news
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