Multi-configurable optical probe for photonic device characterization. Achieve precise, repeatable optical measurements with our optical probes, designed for reliable coupling and alignment in silicon photonics characterization and production testing.
Windows 11 compatible – User-centered design – Efficient and robust. Experience the new Velox 4 probe station control software! Velox is FormFactor’s unique software suite for 200 mm and 300 mm wafer probe stations. It is the universal standard for semi- and fully-automated systems, enabling seamless communication between the user and more than 15 different platforms. Velox reduces total cost of ownership by minimizing training efforts and providing faster time to robust and reliable data. As a key element of FormFactor’s exclusive Contact Intelligence™ technology for autonomous operation, it allows the user to perform measurement tasks faster, safer and more accurately. Velox enables safe and fast wafer loading, easy test automation and measurement system integration, while preventing costly damage of probes and probe cards throughout the entire measurement cycle. Velox is installed on more than 2,100 FormFactor probe stations. Strong customer relationships and continuing advancements make Velox software the clear leader in probe station control. NEW in Velox 4 - Windows 11 ready Upgrade to a modern, secure computing environment with full Windows 11 compatibility. Velox 4.0 provides the foundation for long-term support and future software enhancements. - Enhanced System Performance Powered by a new controller generation with faster processors, expanded memory, SSD storage, and improved graphics capabilities, Velox 4.0 delivers a more responsive user experience and faster data handling. - Ready for Autonomous Test Built to support emerging AI-enabled and autonomous measurement workflows, Velox 4.0 helps laboratories prepare for higher levels of automation and increased operational efficiency. - Greater Software Stability Software consolidation and continuous improvements enhance system reliability while maintaining the familiar Velox user experience and established workflows. - One Platform Across Your Lab Velox 4.0 supports a broad range of FormFactor probe stations, enabling a consistent software environment across manual, semi-automated, and automated test systems. Velox Dash™ Intuitive Probe Station Control at Your Fingertips. Velox Dash™ brings a modern touchscreen experience to probe station control. Its clean, responsive interface provides instant access to the controls and functions used most often, enabling faster, more intuitive operation with just a touch. By combining touchscreen control, hardware joystick functionality, and eVue remote capabilities into a single smart platform, Velox Dash transforms everyday operation into a seamless user experience. Floating Action Buttons - Easy and fast setup of camera views - Go to Light and Image Settings of the selected camera view with only one mouse click Workflow Wizard - Guided workflows for wafer setups, alignment tools and Autonomous Assistants - Workflow wizard shows task-relevant settings and options only - Wizard settings can be corrected anytime – no need to restart the wizard - Wizard helps with intelligent solutions in case of error Progress Bar - Visualizes the progress of setup, alignment and measurement tasks - Status information always at hand Toast Notifications - Informs the user about events, for example “Successful Alignment” - Interacts with the user and helps with intelligent solutions Motorized Positioner Manager - For very complex wafer structures - Enables automatic test of multiple devices in each die location before stepping to the next die - Changes probe layouts automatically for each die - Simple and easy to create and modify layouts - No programming necessary - Easy integration with test executive software Augmented Align - Improves RF, mmW and THz measurement accuracy and simplifies probe positioning - Provides location markers on the screen that help the user know exactly where the probes will land, even if they cannot be seen due to being out of focus. - Particularly helpful on THRU standards where the standard geometry makes it difficult to judge the offset from the edge of the pad. - Interacts with WinCal: depending on their calibration substrate, users can either read FormFactor-predefined overlays or add a custom grouping of overlays. Selective Die Soaking - New level of wafer testing efficiency for non-ambient probing - User can define soak times for each die - Easy-to-use graphical interface Selective Die Alignment - User can define which dies need alignment - No complex adaptations of the Test - Executive necessary Sub Die Handling - Subdies can be labeled with different colors for better differentiation - Drag/drop subdies to different positions in table - Select multiple subdies in table - Filter by labels CONTACT INTELLIGENCE TECHNOLOGY Non-Stop Autonomous Semiconductor Test With FormFactor’s unique Contact Intelligence technology, Velox 3 enables 24/7 autonomous semiconductor test. Contact Intelligence combines smart hardware design, innovative software algorithms and years of experience to create a technology that provides benefits across a wide range of applications. This allows lengthy test routines to be performed overnight or the weekend without operator intervention – even over a wide temperature range. Contact Intelligence accelerates time to accurate data, time to market and ultimately – time to profitability. SECS/GEM Improving your Production Processes SECS/GEM interfaces are a SEMI-standard industry-specific integration layer for semiconductor production. SECS/GEM interfaces establish the connection between the system and the higher level. Production and plant data, alarms, process values, process parameters etc. are transferred via SECS/GEM. AUTOALIGN Quickest Wafer Alignment and Mapping Velox AutoAlign is the most ergonomic and quickest way to align a wafer in X, Y and theta and determine the wafer diameter and die size. It generates a wafer map corresponding to the evaluated die indices and number of recognized dies in both axes. VUETRACK VueTrack™ enables unattended testing over multiple temperatures for positioners or probe cards by automaticall aligning probes to pads, utilizing the eVue Pro microscope. VueTrack eliminates the need for manual re-adjustment and ensures constant contact quality. REALIGN Automatically Aligning Probe to Pads ReAlign™ enables unattended testing over multiple temperatures for probe cards on the CM300xi probe station by automatically aligning probes to pads, utilizing three system-integrated cameras. It is recommended especially for applications with limited microscope view, such as vertical and Pyramid probe cards, or when using a test head. CELLVIEW CellView allows you to easily navigate and orientate on parts of the wafer that are out of view. WORKFLOW GUIDE Easy Step-by-Step Guidance The Velox Workflow Guide enables unexperienced users to perform successful measurements by guiding the operator step-by-step through different processes, no matter if these are simple procedures or complex measurements. VELOX SETUP TOOL All Global Settings in One Place The Velox Setup Tool combines all global Velox settings in one place – from autostart preferences, interface and device settings to license management. This simplifies the setup process, reduces training needs and safes time. Further Velox settings, such as for Control Center, WaferMap and Spectrum, will be successively integrated into the Setup Tool with the next Velox versions. Spectrum Vision – Velox Wafer Probe Station Control Software Spectrum Vision is part of FormFactor’s unique Velox wafer probe station control software. It acts as a powerful aid in wafer navigation, probe placement, wafer alignment, and sub-die navigation. It works seamlessly with the eVue™ multi-camera architecture and further system-integrated cameras to show a view of the needles from the top, the side and/or the bottom. Velox Auto Align – Automated Wafer Alignment and Wafer Map Generation for Probe Stations The Auto Align wizard in Velox provides automated and repeatable wafer alignment based on die pattern recognition, supporting theta alignment, wafer diameter determination and die size extraction. Velox VueTrack – Autonomous Probe-to-Pad Alignment Across Temperatures VueTrack is an exclusive feature of Velox, FormFactor’s wafer probe station control software, supporting Contact Intelligence™ Technology for unattended semiconductor testing over multiple temperatures. Velox Navigation Helper – Clear Stage Position Control in Wafer Probe Stations The Velox Navigation Helper is a powerful feature of FormFactor’s Velox wafer probe station control software. It gives engineers an instant, easy-to-read overview of all key stage positions during wafer test and characterization. Velox Workflow Guide – Standardized Wafer Probe Station Workflows for Semiconductor Test By using the Workflow Guide, labs can: - Define clear, user-specific sequences of tasks - Ensure consistent setup and measurement procedures - Improve training quality and shorten ramp-up time for new users Velox Cleaning Step Patterns – Index, Diagonal & Optimal In this video, we introduce the Cleaning Step Patterns feature for cleaning substrates of type Pad Cleaner, helping you keep probe tips clean and measurement performance stable. Cleaning Probes with Velox Auto Clean Learn how to clean your probes with the Velox Auto Clean feature.
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High-performance RF probe card for wireless RF and microwave production test. Pyramid RF Probe cards provide best-in class RF performance and maintain exceptional signal integrity from the tester interface to the die for semiconductor wafer test. Capable of probing beyond 80 GHz, Pyramid probes provide the highest fidelity measurements for RF applications. Pyramid is capable of both high-volume manufacturing and engineering applications due to its minimal pad damage and low probe inductance. FormFactor’s Pyramid probes have the lowest ground inductance available in a probe card allowing for optimized RF measurements of any RF application from cell phone RF Front End parts to Automotive Radar chips. Production RF probe cards are rugged, robust, and well suited for the rigors of high-performance wafer sort. Their industry-leading signal integrity and mechanical capabilities make these probe cards the perfect fit for multi-die testing for RF wireless and high-speed digital in SiPs and SoCs. Formfactor’s Pyramid Probe cards provide industry proven solutions for meeting these requirements today and in the 5G world to come. Millimeter wave frequency transmission and active antenna arrays are the backbone of the emerging 5G capabilities. Formfactor’s Pyramid Probe Card with membrane technology is the only production proven solution in the mmWave range. Pyramid, now with higher parallelism capability is the probing solution for the high RF line counts and low inductance requirements needed for 5G applications. In digital communication, timing is the most essential element. Whether this is reflected in a wide open eye diagram, a pico-second rise time, devices working at these speeds need RF performance. Pyramid Probe cards from Formfactor provide demonstrated solutions for all high speed applications including TIA/Driver’s, optical transceivers PAM4 and others with a low inductance, highly isolated test solution. The combination of stringent automotive market test requirements and millimeter wave performance up to 81GHz demand measurements of the highest quality. FormFactor’s Pyramid technology offers a proven solution in this application with hundreds of cards shipped and a team of RF expertise to ensure the most accurate results.
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Excellent performance - longest lifetime. The |Z| Probe® patented technology assures high-accuracy measurements with low contact resistance and superior impedance control. The RF/Microwave signal makes only one transition to the coplanar contact structure within the shielded, air-isolated probe body maintaining signal integrity at temperatures as low as 4 K, or as high as 300°C. This capability makes the |Z| probe suitable for the harshest test environments, from cryogenic test and measurement to characterize future computing ICs to high temperatures in closed systems for applications such as automotive devices.
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High power, high performance probe. The |Z| Probe® patented technology assures high-accuracy measurements with low contact resistance and superior impedance control. The RF/Microwave signal makes only one transition to the coplanar contact structure within the shielded, air-isolated probe body maintaining signal integrity at temperatures as low as 4 K, or as high as 300°C. This capability makes the |Z| probe suitable for the harshest test environments, from cryogenic test and measurement to characterize future computing ICs to high temperatures in closed systems for applications such as automotive devices.
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