Real-time autofocus ensures differences in sample height are tracked accurately and quickly. Prior’s PureFocus laser autofocus range is suitable for both life science and industrial samples and is compatible with most infinity-corrected optical systems.
The NanoScan SP Z Series of piezo Z-axis stages offers 200 µm, 400 µm, 600 µm, and 800 µm closed-loop ranges. It is compatible with Prior’s motorized microscope stages and common commercial microscopes. In terms of velocity, settle time, resolution, and repeatability the SP Series out-performs other market-leading piezo stages. This is due to their high inherent resonant frequency and unique control architecture. The stages are ultra-slim for easy access to load samples or for integrating with existing systems. The NanoScan SP Series is suitable for challenging applications such as multiphoton microscopy and whole-organism imaging. Delivered with Queensgate’s low-noise NPC series controller, the NanoScan SP Series can be configured in the field to work with different loads and performance requirements. Key Features - Selection of travel ranges from 200 μm to 800 μm. - Capacitive positioning sensors giving market leading resolution. - Step settle times of <10ms - Loads of up to 500g (higher loads on request) - Connectors with built in stage calibration provide plug and play electronics which can be interchanged, minimizing system down times. - User configurable settings optimized for different sample masses sizes and performance needs. The user simply selects the best setting for their application. - Tested to function for greater than 10 million full range cycles Applications - Optical sectioning producing 3D images - Live cell imaging - Autofocus systems for time lapse imaging - High content screening - Surface analysis - Semiconductor die inspection - OEM custom solutions Specifications SP200 / SP400 / SP600 / SP800 Axis: Z / Z / Z / Z Range: 200 um / 400 um / 600 um / 800 um Position noise: 0.7 nm / 0.7 nm / 0.7 nm / 1.23 nm Repeatability: 3 nm / 3 nm / 3 nm / 3 nm Linearity: 0.20% / 0.20% / 0.20% / 0.20% Step Settle: 8 ms / 8 ms / 9 ms / 10 ms Material: Aluminum/ Stainless Steel / Aluminum/ Stainless Steel / Aluminum/ Stainless Steel / Aluminum/ Stainless Steel Size (L x W x H): 260 mm x 164 mm x 13.7 mm / 260 mm x 164 mm x 13.7 mm / 260 mm x 164 mm x 13.7 mm / 260 mm x 164 mm x 14 mm
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The NanoScan OP400 piezo-driven objective positioner is compatible with most commercial and customized microscopes. The stage features an M32 objective thread as standard with a wide range of adapters available. Settings for inverted or upright operation and load capacity are set during manufacture and can be further tuned in the field to optimize for specific applications. The OP400 provides the fastest step and settle time of any piezo-driven objective positioner with a range of up to 400 µm. It features capacitive feedback sensors that ensure exceptional repeatability and resolution, comparable with devices with shorter ranges. 0-500 g load as standard. High and custom load tuning is available on request. Key features of the NanoScan OP400 - 400μm closed loop travel range (450μm open loop range) - Capacitive positioning sensors give sub nanometer positioning resolution and repeatability - Made from stainless steel providing greater mechanical stiffness (faster) and temperature stability (lowest drift). - The stage is a flexure guided system. The friction free flexures are designed to provide high stiffness and to minimize off axis motions giving high repeatability and faster cycle times. - Options for upright and inverted microscopy applications. - Connectors with built in stage calibration provide plug and play electronics which can be interchanged, minimizing system down times. - Rapid settling times even with large objective loads. Tested to function for greater than 10 million full range cycles. Applications • Optical sectioning producing 3D images • Autofocus systems for time lapse imaging • High content screening • Surface analysis • Wafer inspection • Scanning interferometry Specifications Model: OP400 Axis: Z Range: 400 μm Position noise: 0.7 nm Repeatability: 1.6 nm Linearity: 0.005% Step Settle: 7ms Material: Aluminum/ Stainless Steel Thread: RMS, M25, W26, M27, M32
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The Nanopositioning Tip Tilt Stage NPS-TG-7A has been developed for applications requiring high speed, ultra-high precision, positioning of mirrors in optical inspection, imaging systems and laser pointing devices. A suitable mirror is fixed onto the Tip Tilt platform of the stage to provide 7 milliradians of travel with sub micro-radian resolution. The NPS-TG-7A is designed to operate at high bandwidths for high speed applications. Made from Invar 36, its low thermal expansion matches most optics minimizing any thermal distortion, as well as minimizing any thermal position movement. The standard system offers +/-3.5 mrad travel, however shorter range options are available on request. Suggested Controller: - QGNPC-D-6330 Three Axis Digital Controller Key Features - 7mrad range in each axis with sub micro-radian resolutions at 1.2 kHz. - Capacitance positioning sensors providing unrivalled resolution, linearity, repeatability and bandwidth. - Dynamic performance: high loaded resonant frequencies as well as very high servo loop bandwidths in excess of 1 kHz. - Invar 36 construction, its low thermal expansion closely matches most optics minimizing any thermal distortion. - Enclosed mechanism for high stability and reliability. - Step settle times <2 ms. - Plug and Play: stage connector containing stage calibration data and reference sensor allowing easy controller interchangeability. Applications - Laser scanning - Laser beam stabilization - Atmospheric compensation - Image processing and stabilization - Optical filters/ switches - Scanning microscopy (SPM) - Laser communication point ahead devices Specifications Model: NPS-TG-7A Axis: Tip, Tilt Range: 7 mrad Position noise: 80 nrad Repeatability: 200 nrad Linearity: 0.03% Step Settle: 1.5 ms Material: Invar 36 Size (L x W x H): 95mm x 40mm x 40mm
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The WP120B is Queensgate’s most accurate wafer positioning stage. It uses a parallel-kinematic tripod design to achieve sample leveling of ±50 µrad, while achieving milisecond step-and-settle times over the 120 µm closed-loop Z range. Sub-nanometer-resolution capacitive displacement sensors directly measuring the moving platform, flexure guidance, and high-bandwidth closed-loop control provide exceptional flatness whilst scanning, with pitch and roll errors of less than 2 µrads. The stage is designed to hold 300 mm wafers, with load capacity up to 8 kg, through-holes allow access for wafer lift-pin systems. It is compatible with Prior’s ProScan H112 Large Format XY Stage, which offers a full 300 x 300 mm travel range for wafer inspection and defect detection. Key Features - 120 µm travel in Z (±60 µm) - Tip / tilt range of ± 50 µrad - Load capacity up to 8 kg - Customer selectable presets optimized for specific load requirements Specifications Axis: Z, Tip-Tilt Open Loop Range (Z): 140 µm Closed Loop Range (Z): 120 µm Closed Loop Range (Tip Tilt): 100 µrad Resonant Frequency at 0 kg | 5.2 kg | 8 kg: 320 Hz | 190 Hz | 155 Hz Linearity Error (Z): Min: 0.06%, Max: 0.15% Linearity Error (Tip-Tilt): Min: 0.06%, Max: 0.15% Roll Pitch Yaw: 2 µrad (while commanding Z axis only) Step Settle (1 µm): 9 ms Repeatability, 60 µm step: 5.5 nm Material: Aluminum Stage mass (excluding cables): 5.8 kg Size (L x W x H): 375 x 375 x 30 mm Applications - Wafer inspection / defect detection - Electron microscopy (SEM/TEM) - Interferometry and metrology - Bonding technology - Surface structuring - Wafer probing and chip verification
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