AJA’s SHQ-TS Series can be tilted between +/- 200° in the plane of the substrate surface. With stepper motor control, angular precision is within 0.1°. Azimuthal rotation is available on many of our configuration in conjunction with heating, water-cooling, and RF/DC biasing.Stepper motor controlled tiling and LN2 cooling is also available.This powerful combination of features are typically used in evaporation, ion milling, and multi-technique systems (sputter + e-beam).
