AJA’s reliable substrate heaters can heat substrates from room temperature up to 800°C, 850°C or 1000°C depending on size and heater style. Substrate handling can vary from small pieces to 300mm Ø. Many of our substrate heaters can be equipped with stepper motor controlled rotation to achieve excellent temperature uniformity, co-deposition of alloy films, and pristine/repeatable ultra-thin films. AJA also offers substrate heaters optimized for static heating applications, like combinatorial chemistry, where intentional gradients are required. Additional features can include motorized z-motion, RF/DC biasing, reactive gas distributor, substrate shutter, quartz crystal monitor, and in-situ mask exchange system.
