Hybrid Hexapod (Angulares®) Is our AI-HH-30D-200XY-62Z-80R-LM fit for your requirements? Scanning / Smooth Continuous Movement: Good Fit Step and Settle: Good Fit No Movement on Power Loss: N/A Aperture / Open Center: Good Fit Precision: Good Fit Throughput: Good Fit Product Specifications Model AI-HH-30D-200XY-62Z-80R-LM Stage Hybrid Hexapod (Angulares® ) Travel - XY 200 mm (+/- 100 mm) Travel - Z 62 mm (+ 62 mm/- 0 mm) Travel - Pitch & Roll +/- 30 deg Travel - Yaw 360 deg continuous Dimensions (Length x Width x Height) 571 mm x 401 mm x 322.2 mm Drives XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor); Yaw: Torque Motor Feedback Linear Axes: Non-Contact Optical Linear Encoder; Rotary Axis: Non-Contact Optical Rotary Encoder Bearings Crossed Roller Bearings Rotary Brake Standard: No Brake; Optional: Pneumatic Release, Spring Engage Brake (B) Cables High Flex, 10M Cycle, 3m Length Structure Anodized Aluminum 6061-T6 Environment Ambient Operating Temperature 0°C to 50°C Humidity 10% to 80% Non-Condensing Performance Specifications [1] (STD) ULTRA NANO Bidirectional Repeatability XY +/- 30 nm; Z +/- 200 nm; Pitch And Roll +/- 1 arc-sec; Yaw +/- 0.5 arc-sec Backlash XY 0 nm / arc-sec (no backlash on any axis); Z; Pitch And Roll; Yaw Minimum Incremental Step Size XY < 20 nm; Z < 20 nm; Pitch And Roll < 0.1 arc-sec; Yaw < 0.1 arc-sec Yaw Runout Axial Runout 12 µm 10 µm 5 µm; Radial Runout 12 µm 10 µm 5 µm; Wobble 20 arc-sec 15 arc-sec 10 arc-sec Resolution XY Standard: ~4.88 nm after 4096 Interpolation; Optional: Digital AQB (1 nm - 5000 nm); Z; Pitch And Roll ~0.15 arc-sec; Yaw 0.04 arc-sec Max Linear Velocity [3] XY 100 mm/s; Z 15 mm/s Max Linear Acceleration [3] XY 0.3 G; Z 0.3 G Max Angular Velocity [3] Pitch And Roll 20 deg/s; Roll >3000 deg/s Max Angular Acceleration [3] Pitch And Roll >1000 deg/s²; Yaw >2000 deg/s² Max Payload 5-10 kg Assembly Mass 30 kg
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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