The Gripping Power, Inc. EPS300 high voltage power supply is designed to drive electrostatic chucks gripping semiconductor wafers, under various process conditions, with years of reliable performance. The EPS300 combines the process proven technology of the EPS100 and the software flexibility of the EPS200 into a compact, cost-effective instrument. The small size of the EPS300 allows the direct integration of the unit into a process tool, minimizing the hazards associated with lengthy high-voltage cables. The EPS300 is microprocessor based and is fully programmable. Two remote operating modes (serial and digital) are provided. An isolated, bipolar output voltage of up to 1.0kV DC (model G21301-10) can be produced with the unit. The high voltage output is continuously variable, with output voltage regulation and user defined current limiting (up to 1mA of output current). LED indicators provide unit status information. Serial RS-232 and digital remote control modes are provided. All electrical interfaces are isolated from the high-voltage output and are DC ground referenced or optically isolated. The high-voltage can be turned on and off via a single digital bit input or via an RS-232 command. Optically isolated digital input and output signals are provided to minimize interface issues when replacing other ESC power supplies and mechanical clamp mechanisms. The EPS300 can store up to ten user-defined programs that control the clamping and declamping operation. Each program can be up to 32 steps long. The unit may be directed to execute any one of the ten stored programs, giving the user maximum flexibility in both the setup phase, when testing clamp reliability, and in production operation for a variety of processes. The EPS300 programs are stored in nonvolatile RAM and can be uploaded to a host computer. The EPS300 programming command set includes over 50 instructions, providing the user optimum flexibility for developing sophisticated clamping algorithms for multiple process conditions. The command set of the EPS300 is a based upon the Gripping Power, Inc. popular EPS200 electrostatic chuck power supply command set. Existing user-programs developed for the EPS200 can be uploaded to and executed on the EPS300.
The GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies for 200mm, 300mm and 450mm semiconductor wafer processing. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography. Features - High-power capability for driving large-area Johnsen-Rahbek electrostatic chucks - Efficient switch-mode topology runs cool without forced air - Output center-point can be fully-floating, ground referenced or biased - Voltage output follows user defined chuck and dechuck algorithms - Up to eight different chuck and dechuck programs can be edited and stored for process flexibility - Declamp waveform frequencies of up to 10 cycles per second - Constant voltage and constant current regulation modes - Operation can be controlled by the front panel, analog and digital I/O, RS-232 serial or the USB interface - EtherCAT® and ModBus TCP/IP network interface options available - Wafer sensor adapts to various chuck sizes and RF delivery systems - Small size conserves instrument rack space Electrical GPX series power supplies can be factory configured to operate from 24VDC or 100-240 VAC 50/60Hz. Mechanical Dimensions: 82.5mm (H) x 210.3mm (W) x 300mm (D), 2U rack enclosure Panel Width: 241.3 mm (half-rack) The GPX series power supplies can replace the 645, 646, ECU, ESC10 and the EPS200 power supplies in all electrostatic chuck applications.
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The GPD Series are regulated, high-power, high-voltage power supplies with dual independent outputs which can be configured as electrostatic chuck drivers or bipolar and unipolar power supplies for general purpose laboratory applications which require dual, independent outputs. Features - High-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks - High-current, floating outputs for demanding laboratory requirements, such as capacitor charging applications - Operation can be controlled via analog and digital I/O or the high-speed USB interface - Models with reversible outputs features high current, solid state switches for long-life and fast response - Independent operation of each channel - Electrical interlock provided Electrical All GPD series power supplies are factory configured to operate from 100-240VAC, 50/60Hz. Mechanical Dimensions: 84.0mm (H) x 430mm (W) x 425mm (D), 2U rack enclosure Panel Width: 482.5 mm (full-rack)
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Improved thermal transfer performance; aluminum and ceramic hybrid design Precision manufactured – Flatness ≤3µm and surface roughness Ra ≤0.25µm Helium leak rate ≤0.15 sccm with a backside gas pressure of 10 Torr Nominal operation from 500 to 3000 VDC; current draw 10uA typical Wear resistant ceramic finish survives high-energy plasma etch and cleaning processes Custom, unique, low-volume ESC applications are our specialty Made in the USA; shorter lead times for standard products and new designs
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Gripping Power has produced electrostatic chuck power supplies which are programmable, bipolar, floating and tightly regulated. They are compatible with monopole and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production down to the 10nm class and process development at the 5nm node.
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