XENON S-2210 High-Energy Pulsed Light System

By XENON Corporation

S-2210 High-Energy Pulsed Light System Highest Energy with Better Coverage and Best Uniformity When it comes to delivering photonic energy, nothing compares to XENON’s S-2210 system. This state-of-the-art tool is for researchers and process developers working with nano-materials on heat-sensitive substrates that require rapid sintering, curing or annealing over a wide area with high uniformity. The Intense Pulsed Light system is designed to help develop effective process protocols for a wide range of industrial applications such as curing, semiconductor wafer treatment, printed electronics sintering and rapid annealing. Benefits of using Pulsed Light is that it is a low-temperature process that can offer a significant increase in throughput, which is typically not possible when using traditional oven-based thermal curing or mercury UV lamps. The S-2210’s compact design makes it ideal for developing a process, and then scaling for larger areas or higher throughput by the integration of multiple identical racks. SYSTEM HIGHLIGHTS • Max Pulse Energy Output of 18kJ • User-Friendly Touch Screen Interface • Unprecedented Control of the Pulse Features - Pulse Width 100 μs to 5000 μs- Voltage Adjust 2KV to 3KV - Single Pulse, Burst, Sequence, Continuous • Large Optical Footprint (150mm x 150mm) • Uniformity 3% KEY APPLICATIONS • Printed Electronics • Semiconductors • Displays • Data Storage • Material Research • Device Manufacturing Lamps to Address Your Specific Needs The S-2210 is typically configured with an LH-150 lamp housing for wide area exposure (150mm x150mm). However, alternate lamp housing options are available to provide different optical footprints and energies. The lamp housings are stainless steel, air cooled and designed to be easily serviceable and mounted up to 6 meters away from the electronics rack. The XENON S-2210 delivers Pulsed Light which has an optical spectrum ranging from the deep UV to Infrared. Lamps are available with different spectral cutoffs to better match the light with the process requirements. Versatility and easy to use, a winning combination The operator touch screen allows easy programming of simple to complex pulse profiles in order to deliver the precise optical energies desired. Each pulse pattern, often called a “recipe,” can be used to optimize a process in terms of thermal management, sintering or curing. These “recipes” can be stored and recalled at any time. The S-2210 is part of the XENON family of Pulsed Light solutions