By LayTec GmbH
EpiNet is LayTec’s control and analysis software for EpiTT, EpiCurve® TT and Pyro 400 products. With EpiNet LayTec provides a user-friendly software tool with outstanding monitoring and diagnostic capabilities. Two different packages are available: Basic and Premium, depending on customer needs. Features Measurement of emissivity corrected pyrometry, multi wavelength reflectometry and wafer curvature. Asphericity can be measured when using EpiCurve® TT AR (Advanced Resolution) Full linescan capabilities included (available during run and post run) Display of measurements as time resolved datasets, linescans and pseudo-3D color plot Full integration of Pyro 400 and VCSEL-Add-On (spectral measurements) Storage of evaluated temperature and curvature data in a MS SQL data base Run Type management for easy repetition of identical or similar runs Storage and post-growth recalculation of measured raw data Advanced analysis Analysis recipe for synchronized step-by-step analysis for the growth process Fast determination of growth rate, layer thickness, and optical constants even for very thin layer Composition analysis of AlGaAs and AlInGaP Statistical analysis: average, maximum, minimum and standard deviation determination of slope (e.g. temperature, curvature...) Calculation of oscillation period and number of oscillations In-spec / out-of-control-limits / out-of-spec evaluation for all analysis results for all analysis steps Data processing of the measured data such as noise reduction, drift compensation, spike removal, shifting and scaling VCSEL DBR and special GaN/ Si related analyses Further features EpiCurve® TT or EpiTT and Pyro 400 integration in one single computer Easy-to-use AbsoluT calibration display for temperature calibration Windows 10 64bit compatibility EpiNet licence package Basic / OEM package for basic operation and data analysis Premium package for advanced analysis and process understanding Additional licences for specific features For more information about licence packages please contact sales@laytec.de. EpiNet is developed to support LayTec‘s current line of metrology systems: EpiTT, EpiCurve® TT, Pyro 400 and similar systems. EpiNet is compatible to most Windows 7, 10 and 11 computers. It is recommended to use Windows 10 64bit and a 21+ inch monitor. EpiNet is developed and tested within a certain hardware and software setup due to hardware timings and driver compatibility. EpiNet is actively developed solely on the current and therefore recommended measurement PC setups. Standard Setup* Mainboard: Supermicro X11SSH-LN4F RAM: 16GB ECC DDR4 RAM or more CPU: Intel Core i3-7100 or better (Intel Core-i3/ Intel XEON-E3 CPUs) SSD with 1TB or better Chassis: 1HE Upgrade and Replacement Setup for older Systems Mainboard: Advantech AIMB-786 RAM: 8GB DDR4 RAM or more CPU: Intel Core i3-7100 or better SSD with 500GB or better Chassis: 4HE Upgrade Paths* Systems from 2015 and above generally support Windows 10 64bit and the newest EpiNet version. We recommand an „SSD upgrade“ containing a pre-configured setup for easy integration and minimal downtime. Due to Windows 10 CPU restrictions systems from before 2015 will most likley need a hardware upgrade. Please contact our sales team directly for more information. * Please keep in mind that LayTec will not take responsibility for data loss and/or damage to software or hardware in case of customer changes to the system. This includes settings and additional applications. Profound changes would be: changing BIOS settings or installing introusive software like virus scanners. Please ask our customer support if a specific action is applicable. Measurement systems are not designed for Internet access! Perform regular data backups to counter data loss. Global Network Specifications are subject to further technical development and may differ from those given in the data sheet. In certain cases, performance may be limited by reactor type and/or growth conditions. Please consult our technical sales team to see how LayTec metrology can best serve your specific application.
Combine measurements of temperature and reflectance at three wavelengths in one tool. EpiTT combines measurements of temperature and reflectance at three wavelengths in one tool. For True Temperature (TT), we apply the method of emissivity corrected pyrometry, which delivers the precise surface temperatures of opaque materials at 950 nm (Si, GaAs, InP). For materials that are transparent at 950 nm (GaN, Sapphire, SiC), EpiTT measures the temperature on the top side of the carrier. Measuring reflectance at three wavelengths monitors all essential properties of the growing layers, such as growth rate, film thickness, stoichiometry changes and morphology. EpiTT offers industry standard metrology for all kinds of epitaxial growth systems and is compatible with different main rotation frequencies in the range from 5-1500 rpm. Fields of application - Temperature range: T=450°C to 1300°C for large viewport systems/T=500°C to 1400°C for narrow viewport systems/other temperature ranges on request, e.g. 1500°C for UV LED applications, 1700°C for SiC - Wafer temperature with precision better than ±1K in a range of 600°C to 1400°C - Wafer and area selective measurements - True wafer temperature for opaque semiconductors such as InP, GaAs and Si - Pocket temperature for GaN, Sapphire and SiC Product features Emissivity corrected pyrometry: - Temperature range from 450°C to 1300°C for large viewport systems/500°C to 1400°C for narrow viewport systems / other temperature ranges on request, e.g. 1500°C for UV LED applications, 1700°C for SiC - Accuracy better than 1 K - Wafer and area selective measurements - True wafer temperature for opaque semiconductors such as InP, Graphite (SbS) - Pocket temperature for GaN, Sapphire and SiC Reflectance at three wavelengths: - 950 nm, 633 nm and 405 nm - Growth rate, layer thickness, roughness and other layer qualities - Full performance up to 1500 rpm main susceptor rotation - Further wavelength (e.g. 280nm, 365nm, 1550nm) for special applications are available on request
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X Link® enables fast, automated, non-destructive and accurate evaluation of the level of EVA or polyolefin cross-linking in PV module encapsulation processes. In solar modules, the ethylene vinyl acetate (EVA) or polyolefin encapsulation protects the sensitive solar cells from the environment. In consequence the degree of intermolecular cross-linking of EVA or polyolefin is decisive for the long-term stability and performance of a module. Cross-linking is achieved by thermally curing the polymers during the lamination process. The X Link® system enables fast, automated, non-destructive and accurate evaluation of the level of EVA or polyolefin cross-linking immediately after lamination. It can be integrated into any solar module production site, offering a flexible platform for encapsulation quality control ranging from single point sampling to full module mapping. The stand-alone version is designed for lab applications, manual product sampling, areal mappings, R&D labs and pilot lines, ready to test full-size production-type modules with or without frames. High-resolution spatial mappings of the cross-linking degree and statistical evaluation can be performed. Furthermore, the manual off-line version allows multiple-point measurements on laminates and out-of-production modules, and modules from the field. This setup is a highly useful quality control tool for incoming goods inspection for EPCs, certifiers and consultants. Fields of application - Module encapsulation quality control in glass/backsheet solar module production Product features - Non-destructive test procedure - Testing time of only seconds per measurement points - Flexible module mapping capability - Data output in “% gel content”
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Both emissivity-corrected temperature monitoring and reflectance measurement at three wavelengths are included in all products in our EpiCurve® TT family of products. For reactors with multiple wafer ring configurations, the models with two or three EpiTT heads (EpiCurve®Twin TT and EpiCurve®Triple TT) allow for temperature and reflectance measurements at two or three independent positions respectively.
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All products in the EpiTT family (EpiTT, EpiTwin TT, EpiTriple TT) are available for various MOCVD growth systems such as: - Systems with satellite rotation - Showerhead-like systems - Systems with main susceptor rotation speed up to 1500 rpm - R&D type and customized MOCVD growth systems
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