Our versatile design utilizes a stainless steel box chamber with double hinged door and removeable side plates. This allows us to have these chambers readily available in stock, and are easily customizable per our customer’s requirements.Chambers can be equipped with multi-pocket electron beam sources, thermal evaporation, k-cell, and ion sources. Substrate holders can be equipped with heating, cooling (LN2/H2O), tilting, rotation, and stepper motor controlled wedge shutters.
