This ATC-MC Multi-Chamber System has a unique combination of capabilities. The main deposition chamber includes a UHV 6-Pocket 15cc Linear Electron Beam Gun, and 4” motorized tilting (+/- 180 degrees) substrate holder with LN2 cooling capabilities. The load-lock system at natural static oxidation capabilities ranging between 5-100 Torr. The custom appendage chamber has sample cleaning and analytical capabilities. For sample cleaning the chamber is equipped with substrate heating to 850C for sample degas, and a Hydrogen Atom Beam Source (HABS). The HABS is a thermal gas cracker that produces an absolutely ion-free hydrogen gas beam,avoiding ion induced damage to the substrate. For analytics the chamber is equipped with a HIDEN Temperature Desorption Probe (TPD/TDS). The TDS includes a triple filter mass analyzer configured with a cooled shroud giving the analyzer optimum sensitivity with minimum background contributions to accurately read contaminates being desorbed from the sample surface. In addition, the chamber is equipped with a RHEED and AUGER system from STAIB Instruments. When used in combination this will provide a wealth of complementary structural and chemical information to optimize thin film fabrication and better control of material properties.
