For certain applications, an electromagnetic linear direct drive might not be ideal. This is specifically true for applications that require the ability to hold position (literally no movement on power loss) even during a sudden or necessary power stop or loss. This is often critical when high payloads (but not only high payloads) are involved, or if a stage needs to be mounted other than horizontally. ALIO has therefore extended its range of stages suitable for these kinds of challenges with further Micron 2 (µII) motion systems. Those stages known as the “SBS” and “XBS” series use a frameless torque motor that drives the carrier with a precision ball screw on dual recirculating ball rail bearings. For further strength, certain stages can be equipped with brake options contributing to the safety of the machines. Even with this combination of drive and bearings, the stage will successfully accomplish applications requiring a bi-directional repeatability of only +/-1 µm. The ball screws anti-backlash nut ensures any backlash is avoided. Further information concerning linear displacement accuracy, resolution, flatness, straightness or pitch, yaw, and roll can be found in the specific datasheet available for download: Ball Screw Driven X: AI-SBS-(TRAVEL)00-UII-(BRAKE OPTION) High-Force, High-Payload X: AI-XBS-(TRAVEL)00-UII
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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