This retrofit adds to an existing Orion system the ability for automated deposition of up to 25 test specimens (6 mm size) on a 4” substrate. The user can vary the magnetron power or aperture position between depositions to explore compositional space. Features of this in-field upgrade are: - Motorized z-motion to position the mask very close to substrate surface for well-defined specimens. - Encoder motor indexing to deposition position. - Either mask or substrate can be indexed between depositions to create a circular array of specimens. - Custom aperture sizes can be provided in the mask. - Masking system mounts on an 8” CF flange at axial position (replaces existing center source, if any). - Retracts to chamber bottom when not in use, so user can switch to normal deposition mode without breaking vacuum. - Includes required hardware and AJA Phase-II modifications to control and display combinatorial processing.
