The AJA LabVIEW based Phase II-Au computer control system is used on all Evaporation Systems.This straightforward, user friendly control system utilizes a large 22” articulating screen with wireless keyboard and mouse. The back panel of the hardware module is populated with connectors to interface to all aspects of the sputtering system and to allow for easy future "plug and play" upgrades/expansions. The Phase II-Au control system allows the user to operate in either the “manual mode” or the “automated processing mode.” In the, “automated processing mode” the user designs "process layers” which are then compiled and saved as a “process” to be executed with a single command. The system allows up to 104 unique user entry points which are accessible only by password, limiting access to a user’s process layers and thereby preventing unexpected corruption of a user’s saved processes.Special “soak layers” can be easily incorporated into the process. Adjustable time base Data-logging to a Microsoft Excel spreadsheet is standard.Remote preparation of new processes in a Microsoft Excel spreadsheet emulator format is available as an option. The standard Phase II-Au control system will accommodate up to (3) DC power supplies, (3) RF power supplies, (1) 4-way DC switchbox, (1) 4-way RF switchbox,(1) DC Ion Source, (1) RF Ion Source, (1) Linear or Rotary Ebeam, (1) Deposition Controller,automatic selection of sweep pattern based on material, (4) process gases,(24) Valves/shutters, down stream closed loop automatic pressure control, substrate rotation,substrate tilting and indexing and substrate temperature control. Processes are aborted if plasma is not detected,substrate temperature, process gas or chamber pressure is out of range.
