These three series of products are designed for extreme applications. They can carry heavy, large objects, targets, and products and can be used over extra-long ranges. Equipped with dual recirculating bail rail bearings, driven by a linear direct drive, these robust stages can reach lengths of up to 2m on which with carrier plates up to 300mm wide and either 170mm, 270mm or even 306mm long. It is therefore not surprising that all these stage can carry payloads of up to 100kg and achieve acceleration of 2.0 G -4.0 G. What is perhaps more surprising, however, is that customers can still expect a bi-directional repeatability of less than +/-0.5µm and 1-digit micron and arc-sec in flatness, straightness, pitch, yaw and roll. All details can be found on the datasheets: Micron 2 Wide Dual Rail Linear X: AI-LM-(TRAVEL)00-uII-W Micron 2 Large Carrier Linear X: AI-LM-(TRAVEL)00-uII-WL Micron 2 Extra Large Linear X: AI-(TRAVEL)00-uII-XB
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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