The TLS-EQ-9-S system is a compact, highly stable tunable light source (TLS). It utilizes the Energetiq EQ-9-HP Laser-Driven Light Source (LDLS®) as a broadband light source. A monochromator is used to select the desired output wavelength. The monochromator output is fiber-coupled to the TLS-EQ-9-S system output. The TLS-EQ-9-S system consists of a main TLS housing that includes the internal lamp controller unit and monochromator. The TLS-EQ-9-S system lamp head is installed on the exterior of the TLS housing. Connected to the TLS housing are the remote control, lamp head power supply, monochromator power supply, and interconnecting cables. Connection to nitrogen purge gas is strongly recommended for optimal performance. The TLS-EQ-9-S system consists of a main TLS housing that includes the internal lamp controller unit and monochromator. Connected to the TLS housing are the remote control unit, lamp head power supply, monochromator power supply, and interconnecting cables. The system incorporates the Energetiq EQ-9-HP LDLS, a monochromator, and custom optics. Optical Performance - Wavelength Range: 380 nm – 1100 nm - Wavelength Step Size: 2 nm - Sweep Time, 2 nm Step: 20 ms - Output Connector: SMA Physical Specifications Dimensions (H x W x D) - TLS Housing: 244 x 360 x 284 mm (9.6 x 14.2 x 11.2 in) Weight - TLS Housing: 7.9 kg (17.5 lb) Remote Interface Specifications Digital Inputs - Type: Optocoupler LED - Logic: Active High - Input Voltage: 5VDC - Input Current: 8 mA Digital Outputs - Type: Open collector to ground (digital common) - Logic: Active Low - Voltage: 30VDC max - Sink Current: 8 mA max Power - Voltage: 5VDC, referenced to digital common - Current: 50 mA maximum Serial Interface - Type: RS-485 2-wire (half-duplex) - Connector: Male 9-pin d-sub - Termination: 120 ohms across receiver input (pins 2 and 7) - Interface Protocol: See Appendix A. RS-485 Interface Commands and Pin Assignments - Port Settings: 9600 bps, 8 data bits, 1 stop bit, no parity, no handshaking. Utility Requirements Lamp Controller Electrical - Voltage: 12 VDC ± 5% at 11.7A minimum (140W rating). Power consumption is approximately 100W during normal operation. - Optional AC Adapter: 100-240V ~ ± 10%, 2.5A, 50-60Hz. Monochromator Electrical - Voltage: 24 VDC - Power: 50 W - Connector: 5-pin DIN female - Mating Connector: 5-pin DIN male, Switchcraft 05GM5MX or equivalent - Pin Connections: pins 3, 5: 24 VDC; pins 1, 2, 4: 24 V return Purge Gas - It is strongly recommended that nitrogen purge gas is used during operation of the TLS-EQ-9-S system. For optimal product performance, nitrogen gas purging of the TLS-EQ-9-S system is required. - If nitrogen purge gas is not used, shorter lifetime and faster output degradation (especially in the ultraviolet wavelength range) is expected. Product use without nitrogen purge gas will result in the buildup of ozone (from atmospheric oxygen) and attenuate the light output in the 220-280 nm band, as well as below 200 nm in the presence of atmospheric oxygen and water vapor. - Clean dry nitrogen, grade 4.8 or higher, filtered to 5um, 20 psig (0.14 MPa) supply pressure. With a 20 psig inlet pressure, the EQ-9-HP lamp head will consume approximately 0.5 slm of flow. - Fittings: 4 mm push-to-connect Cooling Fan - 30 CFM Forced Air Cooling – Provided with TLS-EQ-9-S system Environmental Requirements Operating - Ambient Temperature: 15–30 °C. - Relative Humidity: non-condensing, 80% max. for temperatures up to 31 °C, decreasing linearly to 50% max. at 40 °C. - Pollution Degree: Pollution Degree 2 (normally only non-conductive pollution; occasional, temporary condensation possible). - Installation Category: Installation Category II. - Indoor/Outdoor Use: Indoor use only. - Overvoltage Category: Overvoltage Category I. - Operating Altitude: 2,000 m max. - IP Code: IP20. Transport - Temperature: -5–95 °C. - Relative Humidity: non-condensing, 95% max. Components: TLS Housing contains: - Monochromator Power Port - Monochromator Control Port - Lamp Head Power Port - RS-485 Port - Status Indicator LEDs - Remote Control Port - Lamp Head Nitrogen Purge Port - Retroreflector Nitrogen Purge Port - EQ-9-HP Lamp Head Monochromator Power Port: This port is a DIN connector for monochromator power (from external power supply). Monochromator Control Port: This port is a standard mini-USB connector for control of the internal monochromator. Lamp Head Power Port: This port is a jack-screw-secured input for 12 VDC power. RS-485 Port: This port is for the optional RS-485 interface. Remote Control Port: This port provides access to control and status signals. Lamp Head Nitrogen Purge Port: This is a fitting for the nitrogen purge gas. Retroreflector Nitrogen Purge Port: This is a fitting for the nitrogen purge gas. EQ-9-HP Lamp Head: This is the Laser-Driven Light Source that powers the TLS-EQ-9-S system. Internal components of the TLS-EQ-9-S system include: - Coupling Optics - LDLS Controller - Monochromator - Optical Output SMA Connector - Filter Wheel - Kinematic Mount Coupling Optics: The coupling optics focuses light into the monochromator. LDLS Controller: The LDLS controller contains the control electronics for the lamp head. Monochromator: The monochromator is used to tune the system to the desired wavelength bands. Optical Output SMA Connector: This connector is the SMA connector for light output. Filter Wheel: Provides three options for the optical path: 1. Closed 2. Open 3. Order Sorting Filter Kinematic Mount: The coupling optics is mounted on the kinematic mount. This mount has three (3) adjustment screws that can be used to align the input into the monochromator to maximize the output of the tunable light source. The TLS-EQ-9-S system is a Class 1 laser product. The TLS-EQ-9-S system uses a patented laser drive system to excite a plasma that radiates in the UV as well as the visible bands. A Class 4 laser is located in the TLS housing enclosure. The optical configuration of the housing ensures that the direct laser beam cannot exit the unit. The TLS-EQ-9-S system laser product is designated as Class 1 during all normal operation in accordance with IEC 60825-1.
Now featuring extended near-infrared (NIR) wavelengths | 380 nm to 1,100 nm Extended wavelength range now available. The Chromatiq Spectral Engine™ (CSE) is a sophisticated light source capable of matching real-world lighting conditions, emulating illuminant standards, and creating custom spectra. Our award-winning Chromatiq Spectral Engine now features extended near-infrared (NIR) wavelengths that cover the full active range of silicon-based detectors, from 380 nm to 1,100 nm, offering precise alignment between light source and detector. Features - High-fidelity spectral matching - Create and combine custom spectra to meet specific requirements - Integrate into automated ambient light sensor calibration and testing systems The CSE offers unparalleled spectrum match accuracy as well as repeatability and speed when switching between spectra to optimize optical testing and calibration procedures in the production environment. The CSE is built around the high radiance and stability of the Laser-Driven Light Source (LDLS®). The performance of the LDLS, combined with the innovative optical design of the CSE system, enables consistent high-fidelity spectrum matching, rapid switching between selected spectra, and stable color content at various intensities. These attributes support the accurate, repeatable, and efficient production of high-end color, image sensors and ambient light sensors. Match Any Spectrum Extremely fast switching – no settling time between matches. Principle of Operation Optical design optimized for high-fidelity matching Fast switching with no setting time. <10 ms settling time between targeted spectra The CSE applies the unique characteristics of the Laser-Driven Light Source (LDLS®), paired with a digital micromirror device (DMD), to enable users to match any kind of light spectrum, including realistic lighting conditions, standard illuminants, combinations of specific lighting sources, and custom spectra. In contrast to conventional arc lamps, which are operated by running a current through electrodes, an LDLS sustains the emitting plasma by focusing a laser into the light bulb. The result is extremely bright, broadband light from a very small and stable spot. This proprietary technology is at the heart of the CSE, enabling the unmatched spectral resolution, stability, and repeatability of the DMD light source system. The CSE is spectrum tunable source capable of spectral reproduction, spectral color matching, and has the ability to emulate near-infinite combinations of light sources ranging from incandescent to highly structured light sources, such as CFLs, with extremely fast switching necessary to support high-throughput optical component calibration and ambient light sensor characterization. Applications Color and image sensor calibration and testing Image sensor development for vehicle perception systems Color measurement system development and testing Systems are now available for on-site demonstration. Schedule a demo to see how CSE or CSE-NIR work in your space. What is the lifetime / output degradation of the CSE? We recommend changing the bulb inside the laser-driven light source that powers the CSE after 10,000 hours of operation. We define the lifetime of the lamp / bulb as when the intensity has dropped more than 50% at 500 nm. The spectral output at 500 nm decreases about 1% - 2% every 1,000 hours under standard operating conditions with nitrogen purging. How is the CSE different from the Laser-Driven Tunable Light Source (LDTLS®)? The LDTLS generates light within a narrow wavelength band. The narrow band can be centered on a single center wavelength, or progressively scanned across a specific wavelength range. The CSE can match any broadband spectrum and can also generate narrow peaks, either single, or multiple. The CSE can provide a narrow-band wavelength sweep. However, if the narrow-band wavelength sweep is all that is needed, the LDTLS will offer better performance in terms of in-band flux. Does the CSE require nitrogen purge? Yes. Energetiq recommends purging with grade of 4.8 nitrogen or higher filtered to 5 μm, to maintain the optics’ cleanliness. Any less nitrogen grade may cause implications for the lamp head optics and could cause a photo-contamination. Does the CSE require an external spectrometer? The CSE Host Application includes an automated system characterization process that adjusts the output of the CSE based on feedback from a calibrated spectrometer. Characterization is typically performed during system installation and periodically thereafter (typically every month or every several months). An individual spectrometer can support a fleet of any number of CSE systems. One of the following spectrometer models is required for characterization. Is the CSE a laser product? No. During all normal operation of the CSE, there is no laser output. Our products create incoherent broadband radiation. In a contained system, a laser is used to sustain a xenon plasma and the radiation exiting the CSE is from the plasma. Performance Specification Wavelength Range: 380 – 780 nm / 380 – 1100 nm Spectral Resolution: < 5 nm / <15 nm Switching Speed: < 10 ms / < 10 ms Output Type: 6.5 mm liquid light guide / 6.5 mm liquid light guide
CATEGORY
Meet the new Chromatiq Spectral Engine™ Now featuring extended near-infrared (NIR) wavelengths | 380 nm to 1,100 nm Extended wavelength range now available. The Chromatiq Spectral Engine™ (CSE) is a sophisticated light source capable of matching real-world lighting conditions, emulating illuminant standards, and creating custom spectra. Our award-winning Chromatiq Spectral Engine now features extended near-infrared (NIR) wavelengths that cover the full active range of silicon-based detectors, from 380 nm to 1,100 nm, offering precise alignment between light source and detector. Features - High-fidelity spectral matching - Create and combine custom spectra to meet specific requirements - Integrate into automated ambient light sensor calibration and testing systems There are two CSE models available: CSE-EQ-99-VIS, [Extended-range] CSE-EQ-99-VIS-NIR The CSE offers unparalleled spectrum match accuracy as well as repeatability and speed when switching between spectra to optimize optical testing and calibration procedures in the production environment. The CSE is built around the high radiance and stability of the Laser-Driven Light Source (LDLS ®). The performance of the LDLS, combined with the innovative optical design of the CSE system, enables consistent high-fidelity spectrum matching, rapid switching between selected spectra, and stable color content at various intensities. These attributes support the accurate, repeatable, and efficient production of high-end color, image sensors and ambient light sensors. Performance Specification CSE-EQ-99-VIS-NIR: Wavelength Range 380 – 1100 nm; Spectral Resolution <15 nm; Switching Speed < 10 ms; Output Type 6.5 mm liquid light guide Match Any Spectrum Extremely fast switching – no settling time between matches. Principle of Operation Optical design optimized for high-fidelity matching Fast switching with no setting time. <10 ms settling time between targeted spectra The CSE applies the unique characteristics of the Laser-Driven Light Source (LDLS ®), paired with a digital micromirror device (DMD), to enable users to match any kind of light spectrum, including realistic lighting conditions, standard illuminants, combinations of specific lighting sources, and custom spectra. In contrast to conventional arc lamps, which are operated by running a current through electrodes, an LDLS sustains the emitting plasma by focusing a laser into the light bulb. The result is extremely bright, broadband light from a very small and stable spot. This proprietary technology is at the heart of the CSE, enabling the unmatched spectral resolution, stability, and repeatability of the DMD light source system. The CSE is spectrum tunable source capable of spectral reproduction, spectral color matching, and has the ability to emulate near-infinite combinations of light sources ranging from incandescent to highly structured light sources, such as CFLs, with extremely fast switching necessary to support high-throughput optical component calibration and ambient light sensor characterization. Example Match: CIE F12 Applications Color and image sensor calibration and testing Image sensor development for vehicle perception systems Color measurement system development and testing
CATEGORY
Harness Soft X-Ray Technology Other than in synchrotron facilities, soft x-rays (SXR) are difficult to produce. Now, soft x-rays are readily available for any research laboratory at flux levels suitable for imaging and microprobing. The Energetiq EQ-10R- SXR is a compact, easy-to-use, reliable and cost-effective SXR light source system, based on Energetiq’s unique Electrodeless Z-Pinch™ technology using Nitrogen gas. The EQ-10R-SXR source comprises a 19" rack containing the gas subsystems, power delivery subsystem, and control electronics; the Electrodeless Z-Pinch™ source assembly with its integrated vacuum pumping; and a high efficiency pulse modulator. This modular design allows easy integration to the microscope or other applications equipment. The EQ-10R-SXR is capable of delivering up to 400 milliwatts of 2.8 nm power into 2pi steradians and will run continuously at pulse repetition rates of up to 2 kHz. It's easy to install, requiring only electrical power, a chilled water supply, clean dry compressed air, and a supply of high purity Nitrogen. Features Patented electrodeless design Low debris / low consumable cost 2-20 nm Soft X-Rays, gas dependent Enables tabletop SXR microscope applications Small plasma size <1mm diameter for high brightness Cost-effective and compact Low cost per SXR Watt Small footprint Applications Semiconductor Metrology Water-Window Microscopy Electrodeless Z-Pinch™ Technology Clean Operation, Small Plasma Size, and Maximum Flexibility - Clean operation with no electrode debris and magnetically confined plasma - Unmatched spatial stability - Lower cost and complexity - Flexible, adjustable operating conditions - Optimized for peak power or peak brightness - Small plasma size (typically below 1mm in diameter) - Simple, flexible, customizable optical interface with color touch screen display - Manual and automatic operation Patent Numbers: US 7,307,375 -- US 7,948,185 -- DE 1774838 -- DE 2187711 -- GB 1774838 -- GB 2187711 -- JP 5179175 -- KR 10-1173324 NL 1774838 -- NL 2187711 -- US 8,143,790 -- US 7,199,384 -- US 7,183,717 -- US 7,569,791 -- US 8,019,043
CATEGORY
Electrodeless Z-Pinch™ 20 Watt EUV Source High Brightness for EUV Metrology and Inspection With 20 watts, the EQ-10R-HP is ideal for EUV mask inspection, resist development, and more. High pulse repetition rates and low cost per EUV watt make the EQ-10R-HP a highly effective light source powered by our Xenon-based Electrodeless Z-Pinch™ technology. With over 30 EQ-10 units installed around the world, it has become the workhorse for the EUV community through its proven reliability, ease of use, and low operating cost. Its modular design makes it easy to integrate into your process. The system includes the Electrodeless Z-Pinch™ source assembly, vacuum and gas subsystems, power delivery subsystem, and control electronics. The EQ-10R-HP is capable of delivering up to 20 Watts of in-band EUV into 2pi steradians, and will run continuously at pulse repetition rates of up to 2.5 kHz. Features Unique patent-pending Electrodeless Z-Pinch™ technology Low debris / low consumable cost 20 W into 2 pi using Xenon Higher brightness and power for a wide variety of applications Small plasma size Below 1 mm diameter Cost-effective and compact Low cost per EUV Watt Small footprint CE-Mark and SEMI S2-0715 compliant Applications EUV Mask Inspection EUV Metrology EUV Resist Development EUV Microscopy Electrodeless Z-Pinch Technology Clean Operation, Small Plasma Size, and Maximum Flexibility - Clean operation with no electrode debris and magnetically confined plasma - Unmatched spatial stability - Lower cost and complexity - Flexible, adjustable operating conditions - Optimized for peak power or peak brightness - Small plasma size (typically below 1mm in diameter) - Simple, flexible, customizable optical interface with color touch screen display - Manual and automatic operation Patent Numbers: US 7,307,375 -- US 7,948,185 -- DE 1774838 -- DE 2187711 -- GB 1774838 -- GB 2187711 -- JP 5179175 -- KR 10-1173324 NL 1774838 -- NL 2187711 -- US 8,143,790 -- US 7,199,384 -- US 7,183,717 -- US 7,569,791 -- US 8,019,043
CATEGORY
