By LayTec GmbH
DATA SHEET AbsoluT eliminates differences in temperature measurements from reactor-to-reactor caused by reactor, viewport and window variations, as well as run-to-run variations and drifts caused by deposition on the viewport. All parts are clean room compatible! AbsoluT is a high precision instrument for on-site temperature calibration of LayTec’s in-situ devices MOCVD reactors with accessible viewport. It performs temperature calibration of EpiTT and EpiCurve® TT systems inside the MOCVD chamber through the original viewport and alignment. With AbsoluT you can reduce the maintenance time and increase the reactor up-time. Delivery contents: 1 Handheld device with the reference light source 2 Wrist loop to fix the device on your hand when you place it into the glove box chamber 3 Rechargeable battery pack 4 Temperature resistant cable 5 Battery charger 6 Tool case Features: Rechargeable battery pack Type: Li-ion battery LIB (environmentally sealed) Capacity: 3.4 Ah Voltage: 7.2 V Life-time: 150 charging cycles Size (L x W x H): 110 x 60 x 40 mm Weight: 0.7 kg Reference light source / Rechargeable battery pack: Simulated calibration temperature*: 870°C and 920°C (set by LayTec) Accuracy of simulated calibration temperature: ± 1 K Lateral emission uniformity across the emitting area: ± 0.2 K Temperature noise: ± 0.05 K Temperature stability (long term drift): < 0.015 K / h Life-time of the light source according to manufacturer: 10.000 h Warm-up time: 1 min Operating time with fully charged battery pack: Approx. 8 h Size (L x W x H): 130 x 96 x 80 mm Weight: 0.9 kg *Re-calibration is recommended once a year Specifications of the battery charger: Voltage: 12 V Current: 1.6 A Size (L x W x H): 70 x 50 x 50 mm Operation conditions: Operation Temperature: + 19°C... + 30°C Storage Temperature: - 10°C... + 45°C Operation Max. humidity: 50 % Storage Max. humidity: < 80% Availability: AIXTRON Close Coupled Showerhead® and Planetary® reactors equipped with LayTec devices with the temperature module TT (True Temperature) EpiTT, EpiTwin TT, EpiTriple TT, EpiCurve® TT. AbsoluT can be also applied to other growth systems in which the lid can be opened allowing free access to the viewport. Developed, manufactured and qualified in Germany. Specifications are subject to further technical development and may differ from those given in the data sheet. In certain cases, performance may be limited by reactor type and/or growth conditions. Please consult our technical sales team to see how LayTec metrology can best serve your specific application.
Combine measurements of temperature and reflectance at three wavelengths in one tool. EpiTT combines measurements of temperature and reflectance at three wavelengths in one tool. For True Temperature (TT), we apply the method of emissivity corrected pyrometry, which delivers the precise surface temperatures of opaque materials at 950 nm (Si, GaAs, InP). For materials that are transparent at 950 nm (GaN, Sapphire, SiC), EpiTT measures the temperature on the top side of the carrier. Measuring reflectance at three wavelengths monitors all essential properties of the growing layers, such as growth rate, film thickness, stoichiometry changes and morphology. EpiTT offers industry standard metrology for all kinds of epitaxial growth systems and is compatible with different main rotation frequencies in the range from 5-1500 rpm. Fields of application - Temperature range: T=450°C to 1300°C for large viewport systems/T=500°C to 1400°C for narrow viewport systems/other temperature ranges on request, e.g. 1500°C for UV LED applications, 1700°C for SiC - Wafer temperature with precision better than ±1K in a range of 600°C to 1400°C - Wafer and area selective measurements - True wafer temperature for opaque semiconductors such as InP, GaAs and Si - Pocket temperature for GaN, Sapphire and SiC Product features Emissivity corrected pyrometry: - Temperature range from 450°C to 1300°C for large viewport systems/500°C to 1400°C for narrow viewport systems / other temperature ranges on request, e.g. 1500°C for UV LED applications, 1700°C for SiC - Accuracy better than 1 K - Wafer and area selective measurements - True wafer temperature for opaque semiconductors such as InP, Graphite (SbS) - Pocket temperature for GaN, Sapphire and SiC Reflectance at three wavelengths: - 950 nm, 633 nm and 405 nm - Growth rate, layer thickness, roughness and other layer qualities - Full performance up to 1500 rpm main susceptor rotation - Further wavelength (e.g. 280nm, 365nm, 1550nm) for special applications are available on request
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X Link® enables fast, automated, non-destructive and accurate evaluation of the level of EVA or polyolefin cross-linking in PV module encapsulation processes. In solar modules, the ethylene vinyl acetate (EVA) or polyolefin encapsulation protects the sensitive solar cells from the environment. In consequence the degree of intermolecular cross-linking of EVA or polyolefin is decisive for the long-term stability and performance of a module. Cross-linking is achieved by thermally curing the polymers during the lamination process. The X Link® system enables fast, automated, non-destructive and accurate evaluation of the level of EVA or polyolefin cross-linking immediately after lamination. It can be integrated into any solar module production site, offering a flexible platform for encapsulation quality control ranging from single point sampling to full module mapping. The stand-alone version is designed for lab applications, manual product sampling, areal mappings, R&D labs and pilot lines, ready to test full-size production-type modules with or without frames. High-resolution spatial mappings of the cross-linking degree and statistical evaluation can be performed. Furthermore, the manual off-line version allows multiple-point measurements on laminates and out-of-production modules, and modules from the field. This setup is a highly useful quality control tool for incoming goods inspection for EPCs, certifiers and consultants. Fields of application - Module encapsulation quality control in glass/backsheet solar module production Product features - Non-destructive test procedure - Testing time of only seconds per measurement points - Flexible module mapping capability - Data output in “% gel content”
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Both emissivity-corrected temperature monitoring and reflectance measurement at three wavelengths are included in all products in our EpiCurve® TT family of products. For reactors with multiple wafer ring configurations, the models with two or three EpiTT heads (EpiCurve®Twin TT and EpiCurve®Triple TT) allow for temperature and reflectance measurements at two or three independent positions respectively.
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All products in the EpiTT family (EpiTT, EpiTwin TT, EpiTriple TT) are available for various MOCVD growth systems such as: - Systems with satellite rotation - Showerhead-like systems - Systems with main susceptor rotation speed up to 1500 rpm - R&D type and customized MOCVD growth systems
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