Air Bearing System - XY Planar Air Bearing Stage Is our AI-LM-50000-ABL fit for your requirements? Scanning / Smooth Continuous Movement: Best Fit Step and Settle: Best Fit No Movement on Power Loss: N/A Aperture / Open Center: Good Fit Precision: Best Fit Throughput: Good Fit Product Specifications Model: AI-LM-50000-ABL Stage: XY Planar Air Bearing Stage Travel - XY: 500 mm (+/- 250 mm) Optional Travel - Yaw Compliance: Optional: +/- 0.1 deg Dimensions (Length x Width x Height): 1550 mm x 1100 mm x 145 mm Dimensions Moving Plate (Length x Width): 404 mm x 423.4 mm Drives: Direct Drive (Ironless Core Linear Motor) Feedback: Non-Contact Optical Linear Encoder Bearings: Air Bearings Cables: High Flex, 10M Cycle, Trackless Cable Routing; Optional: Customer/Payload Cable Routing Available Structure: Anodized Aluminum 6061-T6 Base Structure: Precision Lapped Black Granite Environment: Ambient; Optional: Clean Room Operating Temperature: 0°C to 50°C Humidity: 10% to 80% Non-Condensing Performance Specifications Accuracy: < +/- 0.5 µm Repeatability: < +/- 100 nm Straightness: < +/- 0.5 µm Flatness: < +/- 1 µm Max Velocity: > 1 m/s Max Acceleration: > 1 G Load Capacity: 20 kg; Optional: 80+ kg Assembly Mass: Depending on specific Configuration - Ask ALIO Configurable Options ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements Custom Plate L x W x H Custom X and/or Y Travel Custom User Mounting Interface Features Custom Platen Designs (Open Center Options) Custom Compact Designs for Small Footprint Customer Cable Routing Customizable Motor Forces Custom High Payload Options Custom Granite Features and Sizes Various Material Options Throughout Single Axis Versions Available (Y Axis Only) Various Support and Vibration Isolation Options Various Safety System Options Various Control Chassis Options
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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