The Radial Turret design locates multiple source heads, oriented radially, on the end of a rotatable support tube running through a hollow shaft, UHV, ferroflluid rotary vacuum feedthrough. The source heads are cooled and powered through the support tube and the assembly is indexed to aim the desired source at the substrate. A single port can be used to introduce multiple magnetrons into a deposition chamber.Turrets are available with up to 12 heads and integral RF/DC matchbox/switchbox modules.
