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Waveguides with gratings using evanescent field excitation for high-sensitivity sensing platforms

By IMT Masken und Teilungen AG

Waveguides with gratings using evanescent field excitation for high-sensitivity sensing platforms Principle of evanescent field sensing using thin film waveguides with sub-micrometric gratings for light coupling. The small extension of the evanescent field above the waveguide allows very high detection sensitivity. Grating Laser Waveguide Applications - Life science sensing applications - Analysis of living molecules in real time Benefits - High quality gratings, excellent homogeneity - Low defect ratio (also for large chip formats) - High repeatability at volume production - Competitive up-front costs - Combination with fluidic channels Technical Data Substrate materials - Schott D263T (or equivalent) - Refractive index: 1.52 at 633 nm - Dimension: 5“ × 5“ × 0.7 mm (or thinner) Waveguide (planar or rib) - Material: Ta 2O5 (or other oxides) - Refractive index: 2.12 at 633 nm - Thickness: 100 - 500 nm - Attenuation: < 3 dB / cm at 532 nm Light coupling grating - Binary phase grating - Period: 300 - 1000 nm - Depth: 10 - 100 nm

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