The CT-series offers unmatched flexibility where you need it most. With its multi-sensor design, it seamlessly integrates up to six different sensor technologies into a single system. Plus, its advanced automation takes efficiency to the next level. Versatile Metrology System for Production & Laboratory with a scanning area of up to 315 x 315 mm².
The CT300 Wafer Lift combines a vacuum chuck with lift pins to handle wafers up to 300 mm. Designed to measure processed wafers the system is equipped with a confocal microscope and white light interferometer to measure smallest features.
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With its integrated conveyor for trays and boats the system automates sample handling, measurement and analysis — without operator interference. Powered by a high-speed chromatic confocal line sensor, it delivers results in seconds, boosting efficiency and productivity.
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We offer custom designed interfaces. E.g. the semi-automated chuck for trays and boats providing precise sample positioning, suitable for both manual and automated use.
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The CT-series offers unmatched flexibility where you need it most. With its multi-sensor design, it seamlessly integrates up to six different sensor technologies into a single system. Plus, its advanced automation takes efficiency to the next level. Versatile Metrology System for Production & Laboratory with a scanning area of up to 350x 350 mm².
CATEGORY
