The Gripping Power, Inc. EPS200 high voltage DC power supply was designed to drive semiconductor wafer electrostatic chucks in all process conditions, with years of reliable performance. The EPS200 is microprocessor based and is fully programmable. One local and three remote operating modes are provided. The unit is available with either 1kV or 2.5kV true floating, bipolar outputs. The high voltage output is continuously variable, with output load voltage tracking and user defined current limiting. A back-lit LCD displays voltage, current and status information. The local operation mode provides the user the means of testing programs and diagnosing hardware problems, via the EPS200 front panel, without the use of a host computer interface. Serial RS-232, digital, and analog remote control modes are provided. All electrical interfaces are isolated from the high-voltage output and are ground referenced. The high-voltage can be turned on and off via a single digital bit input. An analog input is provided for remote high voltage control. Two digital output signals are provided to minimize interface problems when replacing mechanical chuck mechanisms with electrostatic chucks. A digital alarm output signal is also provided. The EPS200 can store up to ten user defined programs that control the chuck and dechucking operation. Each program can be up to 32 steps long. The unit may be directed to execute any one of the ten stored programs, giving the user maximum flexibility in both the setup phase, when testing chuck reliability, and in production operation. All ten of the EPS200 programs are stored in nonvolatile RAM and can be downloaded to a host computer. The EPS200 programming command set provides the user optimum flexibility for developing sophisticated chucking algorithms for multiple process conditions. The EPS200 is designed for installation in a standard 9.5 inch equipment half-rack or it can be use as a desktop instrument. The EPS200 is specifically designed to operate electrostatic chucks and it provides many features that are not normally associated with a general purpose, high-voltage power supply.
The GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies for 200mm, 300mm and 450mm semiconductor wafer processing. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography. Features - High-power capability for driving large-area Johnsen-Rahbek electrostatic chucks - Efficient switch-mode topology runs cool without forced air - Output center-point can be fully-floating, ground referenced or biased - Voltage output follows user defined chuck and dechuck algorithms - Up to eight different chuck and dechuck programs can be edited and stored for process flexibility - Declamp waveform frequencies of up to 10 cycles per second - Constant voltage and constant current regulation modes - Operation can be controlled by the front panel, analog and digital I/O, RS-232 serial or the USB interface - EtherCAT® and ModBus TCP/IP network interface options available - Wafer sensor adapts to various chuck sizes and RF delivery systems - Small size conserves instrument rack space Electrical GPX series power supplies can be factory configured to operate from 24VDC or 100-240 VAC 50/60Hz. Mechanical Dimensions: 82.5mm (H) x 210.3mm (W) x 300mm (D), 2U rack enclosure Panel Width: 241.3 mm (half-rack) The GPX series power supplies can replace the 645, 646, ECU, ESC10 and the EPS200 power supplies in all electrostatic chuck applications.
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The GPD Series are regulated, high-power, high-voltage power supplies with dual independent outputs which can be configured as electrostatic chuck drivers or bipolar and unipolar power supplies for general purpose laboratory applications which require dual, independent outputs. Features - High-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks - High-current, floating outputs for demanding laboratory requirements, such as capacitor charging applications - Operation can be controlled via analog and digital I/O or the high-speed USB interface - Models with reversible outputs features high current, solid state switches for long-life and fast response - Independent operation of each channel - Electrical interlock provided Electrical All GPD series power supplies are factory configured to operate from 100-240VAC, 50/60Hz. Mechanical Dimensions: 84.0mm (H) x 430mm (W) x 425mm (D), 2U rack enclosure Panel Width: 482.5 mm (full-rack)
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Improved thermal transfer performance; aluminum and ceramic hybrid design Precision manufactured – Flatness ≤3µm and surface roughness Ra ≤0.25µm Helium leak rate ≤0.15 sccm with a backside gas pressure of 10 Torr Nominal operation from 500 to 3000 VDC; current draw 10uA typical Wear resistant ceramic finish survives high-energy plasma etch and cleaning processes Custom, unique, low-volume ESC applications are our specialty Made in the USA; shorter lead times for standard products and new designs
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Gripping Power has produced electrostatic chuck power supplies which are programmable, bipolar, floating and tightly regulated. They are compatible with monopole and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production down to the 10nm class and process development at the 5nm node.
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