Rotary Motion System - Rotary Stage Is our AI-TM-104RA fit for your requirements? Scanning / Smooth Continuous Movement: Best Fit Step and Settle: Best Fit No Movement on Power Loss: N/A Aperture / Open Center: Good Fit Precision: Best Fit Throughput: Best Fit Product Specifications Model AI-TM-104RA Stage Rotary Stage Travel 360 deg continuous Diameter 104 mm Dimensions (Length x Width x Height) 123 mm x 104 mm x 80 mm Aperture / Thru 32 mm Drive Torque Motor Feedback Non-Contact Optical Rotary Encoder Sensors Integrated Home Bearings Angular Contact (Duplex Pair) Cables High Flex, 10M Cycle, 3m Length Structure Anodized Aluminum 6061-T6 Environment Ambient Optional: Clean Room and Vacuum (10-6 Torr) Operating Temperature 0°C to 50°C Humidity 10% to 80% Non-Condensing Performance Specifications (STD / ULTRA NANO) Angular Accuracy: N/A / +/- 3.0 arc-sec Bidirectional Angular Repeatability: +/- 0.5 arc-sec / +/- 0.5 arc-sec / +/- 0.3 arc-sec Axial Runout: +/- 5.0 µm / +/- 3.5 µm / +/- 2.0 µm Radial Runout: +/- 5.0 µm / +/- 3.5 µm / +/- 2.0 µm Wobble: +/- 10.0 arc-sec / +/- 5.0 arc-sec / +/- 3.0 arc-sec Resolution: Standard: 0.02 arc-sec (Analog), Optional: 0.05 - 21.0 arc-sec (Digital) Max Velocity: 10000 deg/s Max Acceleration: 500000 deg/s² Max Load (Axial): 10 kg Max Load (Radial): 10 kg Assembly Mass: 2.7 kg
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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