ALIO’s patented 2-axis planar XY air bearing system has set the bar in the world of 6-D Nano Positioning®. As both axes use the same highly precise granite base as reference, advanced flatness of just a single micron over several hundreds of mm (or even meters) of travel ranges can be achieved. Thanks to ALIO’s patented design and the proprietary 6-D Nano Precision test methods, this highly stiff family of planar xy air bearing motion systems delivers sub-micron accuracy, and a +/- 100nm bi-directional repeatability even in higher quantities for serial machine production. With 200 mm to 800mm standard versions, and possible customizations to over 3 meters of X and Y travel, this product family has no equal for True Nano® precision in any kind of measurement / metrology applications and in the semiconductor industry. Powerful linear direct drives and air bearings make these motion systems perfectly suited to high precision, high throughput applications that require smooth continuous scanning or a fast step-and-settle process over very long distances. For more information on the planar xy air bearing stages, and the numerous customization options available, contact ALIO or have a brief look at following data sheet: Planar XY Air Bearing Stage: AI-LM-(TRAVEL)00-ABL
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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