Hybrid Hexapod Is our AI-HH-ST14-200XY-60Z-104R fit for your requirements? Scanning / Smooth Continuous Movement: Best Fit Step and Settle: Best Fit No Movement on Power Loss: Best Fit Aperture / Open Center: Good Fit Precision: Good Fit Throughput: Fit Product Specifications Model AI-HH-ST14-200XY-60Z-104R Travel - XY 200 mm (+/- 100 mm) Travel - Z 60 mm (+ 60 mm /- 0 mm) Travel - Pitch & Roll+/- 30 deg Travel - Yaw 360 deg continous Dimensions (Length x Width x Height)292 mm x 275 mm x 400 mm Stage Hybrid Hexapod Drives XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor Feedback Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder Bearings Crossed Roller Bearings Counterbalance Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) Cables High Flex, 10M Cycle, 3m Length Structure Anodized Aluminum 6061-T6 Environment Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr Operating Temperature 0°C to 50°C Humidity 10% to 80% Non-Condensing Performance Specifications(STD) Linear Resolution with Encoder Option Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) Pitch And Roll Resolution with Encoder Option~0.01 arc-sec Yaw Resolution with Encoder Option 0.02 arc-sec Max Linear Velocity [2]20 mm/s Max Angular Velocity (Pitch & Roll) [2]10 deg/s Max Angular Velocity (Yaw) [2]540 deg/s Max Payload [3]10 kg Assembly Mass 28 kg
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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