By ISP System
Our expertise in deformable mirrors is internationally recognised. Today, we design mirrors with diameters of up to 400 mm. Combined with our expertise in micro- and nano-positioning, we also manufacture optical mounts.
6 axes positioning: Ty, Tz – Translation Tx, Ty mirror- Translation Rx, Rz mirror – Rotation Resolution: - Translation: 1 µm - Rotation: 1,5 µrad Precision Translation: 50 µm Rotation: ±100 µrad max Speed Ty, Tz: 0,05 mm/s Tx mirror: 0,4 mm/s Ty mirror: 0,3 mm/s Rx mirror: 1 mrad/s Rz mirror: 1,5 mrad/s Vacuum environment 10-6 mbar
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