All of the performance. None of the limitations. GP200 Series is the first fully pressure-insensitive pressure-based mass flow controller (P-MFC) designed specifically for advanced Etch and Deposition processes in semiconductor manufacturing. The GP200 Series P-MFC features a patented architecture that overcomes the limitations of conventional P-MFCs to provide the most precise process gas delivery even when delivering low vapor pressure process gases. It includes several unique design aspects, including an integrated differential pressure sensor coupled with a downstream valve architecture enabling the most precise process gas delivery over the widest range of operating conditions in the industry. Since GP200 Series supports such a broad range of process conditions, it can be used as a drop-in replacement and upgrade for many traditional P-MFCs and thermal MFCs. It reduces the complexity and cost of ownership of the gas delivery system because it eliminates the need for components such as pressure regulators and transducers. Features - True differential pressure measurement - Lower inlet pressure operation - Downstream valve architecture - Matched transient response - Zero Leak-by Control Valve - MultiFlo TM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy - Local display indicates flow, temperature, pressure and network address - DeviceNet TM, certified by ODVA, EtherCAT®, RS-485 L-Protocol and analog interfaces Applications - Semiconductor manufacturing - Etch - Chemical Vapor Deposition (CVD) - Gas flow control applications that require a high purity all-metal flow path Benefits - By removing the requirement to match and compensate two separate pressure transducers, the GP200 differential pressure technology reduces measurement uncertainty for enhanced accuracy, repeatability and drift performance. - Safer fab operation at lower inlet pressures is now achievable with a P-MFC due to the GP200 differential pressure sensor that is specifically optimized for low differential pressure measurement. - The downstream valve architecture ensures accuracy is independent of downstream pressure, enabling flow delivery into pressures as high as 1200 Torr. The fast closing valve addresses non-productive recipe wait times, or "tail effects," seen in upstream MFC valve designs that require additional time to bleed down their internal volume of gas. - Ultra-fast, highly repeatable ascending and descending flow stabilization time enables tighter process control in advanced high cycle Deposition and Etch processes. 100X improvement in valve shut-down - With MultiFloTM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility - Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting Specifications Type of Media: Gas Flow Measuring Principle: Pressured-based (P-MFC) Flow Range: 3 sccm - 50,000 sccm Accuracy Range: Zero Leak Valve: <±1% S.P. (5-100% F.S.), <±0.05% F. S. (0.5-5% F.S.), Metal Seal Valve: <±1% S.P. (5-100% F.S.), <±0.05% F. S. (2-5% F.S.) Turndown Ratio: Zero Leak Valve: 0.5 - 100% F.S., Metal Seal Valve: 2 - 100% F.S. Repeatability: < ±0.15% S.P. Max Pressure: 150 psi Operating Temperature: 10°C - 60°C Measure/Control: Measure & Control (Controller) Max Flow: 50 slpm Max Flow: 50000 sccm Max Operating Pressure: 10 bar Max Temperature: 60 celsius Seal Option: Metal Accuracy (% of rate): ±1.0% Connectivity: Analog (0–5 V), DeviceNet, EtherCAT, RS485
MODELS: SLA5850 / SLA5851 / SLA5853 / SLA5860 / SLA5861 / SLA5863 Advance and simplify your mass flow control Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable output on the other side. That's the advanced simplicity you get with the SLA5800 Series digital mass flow controllers and meters. The SLA5800 Series features the high accuracy, zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with a superior design - and manufactured with advanced metrology and test systems - the SLA5800 digital MFC offers a better zero drift specification than competitive products. SLA5800 has been proven to maximize production uptime and reduce maintenance and machine downtime costs. Optimize your bioprocessing application with SLA Biotech Options Packages designed specifically to improve bioprocessing performance. Features - Long-term zero stability of ‹ 0.2% full scale per year - Excellent accuracy backed by traceable calibration standards. - Wide range of flow ratings - from 0.003 up to 2500 lpm - Highest pressure ratings - up to 1500 psi/100 bar (optional: 4500 psi/310 bar) - Programmable multi-gas/multi-range capabilities - Independent & easily accessible diagnostic/service port - Broad array of available communication options now includes EtherNetIP™, ODVA certified, PROFINET, which feature a web-based interface that lets you easily configure network settings. and ODVA certified DeviceNet. - Modular design is easy-to-service at the factory or in the field - Biotech Options Packages: Enhance the SLA5800 with features designed specifically to improve bioprocessing performance. Benefits - Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership - ISO/IEC 17025 certification and calibration available with flow accuracy of ±0.6% of SP - Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points - Choose one device platform for different gases and flow ranges - Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory - User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation - Durable, robust metal top lid prevents damage during installation - EtherNet|P™ and PROFINET permit multiple, additional diagnostics beyond those provided by the mass flow controller alone, giving users rich, real-time system information Specifications Flow Measuring Principle: Thermal (TMF) Flow Range:.003 - 2500 slpm Accuracy Range: Up to ±0.6% of S.P. (20-100% FS) ±0.12% of FS (<20% FS) Turndown Ratio: 1-50 slpm: 100:1, 50-2500 lpm: 50:1 Repeatability: 0.20% S.P. Max Pressure: 1500 psi Operating Temperature: -14°C - 65°C Measure/Control: Measure & Control (Controller), Measure Only (Meter) Max Flow: 2500 slpm Max Flow: 2500000 sccm Max Operating Pressure: 310 bar Max Temperature: 65 celsius Seal Option: Elastomer Accuracy (% of rate): ±0.6%, ±0.9% Connectivity: RS485, DeviceNet, EtherCAT, Profibus, EtherNet/IP, PROFINET, Analog (0–5 V), Analog (0–10 V), Analog (0–20 mA), Analog (4–20 mA)
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MODELS: GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126 High purity flow path. Outstanding performance, reliability, and repeatability. Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFlo TM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy. The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity. Features - Long-term zero stability of <±0.5% full scale per year - Settling times: 300 ms - <700 ms or 700 ms - <1 second - Full-scale flow rates up to 300 slpm - All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish - Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures - MultiFlo TM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy - Local display - Optional SDS gas delivery - Optional high-temperature model - DeviceNet TM, RS-485 L-Protocol and analog interfaces Applications - Semiconductor etch tools - Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD) - Physical vapor deposition (PVD) systems - Epitaxial process systems - Advanced strip processes Benefits - High-performance components marathon tested to seven times semiconductor industry standards for reliability - All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps - With MultiFlo TM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs - Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands - Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting - GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes - GF120xHT high-temperature mass flow controller can withstand operating environments of up to 150°C Specifications Type of Media: Gas Flow Measuring Principle: Thermal (TMF) Flow Range: Standard GF Series: 3 sccm - 55 slpm, High Flow GF Series: 55 slpm - 300 slpm Accuracy Range: Standard GF Series: ±1% S.P. 35-100%; ±0.35% F.S. 2-35%, High Flow GF Series: ±1% S.P. 35-100%; ±0.35% F.S. 2-35% Turndown Ratio: Standard GF Series: 2-100%, High Flow GF Series: 5-100% Repeatability: 5 - 100% = ±0.15% S.P,.2 - 5% = ±0.015% F.S. Max Pressure: 500 psi Operating Temperature: 10°C - 50°C Measure/Control: Measure & Control (Controller), Measure Only (Meter) Max Flow: 300 slpm Max Flow: 55000 sccm Max Temperature: 50 celsius Seal Option: Metal Accuracy (% of rate): ±1.0% Connectivity: RS485, DeviceNet
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MODELS: MT3809G / MT3810G Proven Performance for Demanding Process Conditions The MT3809 Series metal tube variable area flow meter delivers reliable gas and liquid flow measurement across an exceptionally wide range of pressures, temperatures and flow rates. Proven in thousands of installations worldwide, it is a practical, economical choice for demanding industrial applications. Available with mechanical or electronic indication, alarms and digital communications, the MT3809 can be configured to meet a wide range of process and hazardous-area requirements. Now backed by an industry-leading 24-month warranty for added confidence in every installation. Features & Benefits - Wide Operating Range: Measures gas and liquid flow from very low to high flow rates across process temperatures from -198°C to 420°C (-325°F to 788°F) and standard pressures up to 6,000 psi / 1379 bar. Turndown ratio is 10:1, with 1%, 2%, 3%, and 5% accuracy options available. - Flexible Configuration Options: Choose from multiple materials, process connections, indicator configurations, alarms and control options, with more capabilities through our custom engineered specials program. - Digital Display & Local Operator Interface: Optional transmitter provides flow indication, totalization and alarms, with parameter adjustments available locally without removing the enclosure cover. - Material Traceability: NACE and 3.1-level material traceability options are available to meet demanding EPC projects, industrial and sour-service documentation requirements. - Global Certifications & Approvals: Extensive hazardous-area, functional safety, marine and regional approvals help simplify specification for installations worldwide - ATEX, IECEx, SIL 2, CSA, UL, and more. Explosion Proof (XP) and Intrinsically Safe (IS) options also available. - Process & Safety System Integration: Available 4–20 mA HART and FOUNDATION Fieldbus communications, plus alarm configurations for integration with plant control and safety systems. - 24-Month Warranty: Industry-leading warranty coverage provides added confidence in the long-term reliability of your MT3809 investment Applications - Oil & gas production and processing - Wellhead platforms - Chemical and petrochemical processing - Refining - Power generation - Industrial gas systems - Flare stack flow measurement - High-pressure and high-temperature flow measurement - Hazardous-area installations Specifications Type of Media: Gas / Liquid Flow Measuring Principle: Variable Area (VA) Flow Range: Water: 440 gpm / 100,000 l/h, Air: 750 scfm / 1200 m3n/hr Accuracy Range: ±2% FS / Class 2.5 VDI / VDE, ±1% FS / Class 1.6 VDI / VDE, ±5% FS / Class 4 VDI / VDE, ±3% FS / Class 2.5 VDI / VDE Repeatability: All options except ELF: 0.25% FS, ELF: 1% FS Operating Temperature: -198°C - 420°C Measure/Control: Measure Only (Meter) Max Flow: 20000 slpm Max Flow: 21237000 sccm Max Flow: 100000 l/hr Max Operating Pressure: 1379 bar Max Temperature: 420 celsius Ingress Protection: IP66, IP67, Nema 4x, IP65 Hazardous Area Approved: Class 1 Div 2, Class 1 Div 1, Zone 2, Zone 1 Accuracy (FS): ±2% FS, ±1% FS, ±5% FS, ±3% FS Connectivity: Analog (4–20 mA), Analog (0–20 mA), Analog (0–10 V), Analog (0–5 V)
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MODELS: 1250A / 1255A / 1350G / 1355G / 1358F Proven performance for low flow rates. Versatile options to match your needs. For a wide range of chemical, petrochemical, biotechnology, research and analytical applications, Sho-Rate™ Series glass tube variable area flow meters provide industry-leading repeatability and reliability in two versatile lines. Sho-Rate™ 1350/1355 flow meters deliver up to 3% accuracy and 0.25% repeatability depending on the model. Sho-Rate™ 1250/1255 flow meters offer a durable, cost-effective design to meet OEM requirements for systems requiring metering and analyzer integrators. Features - Flow Ranges: - Air: Up to 140 scfh / 63 slpm - Water: Up to 34 gph / 2000 cc/min - Borosilicate glass tubes are compatible with most gases and fluids - Float materials include black glass, 316 stainless steel, sapphire, Carboloy®, tantalum - Magnification ensures scales are easy to read Sho-Rate™ 1350 / 1355 / 1358 features include: - Three accuracy levels: 3% (low-flow Model 1355), 5% (low-flow Model 1350) or standard accuracy of 10% (high-flow Model 1358) - Repeatability of 0.25% Full Scale (0.5% Full Scale for Model 1358) - Scale includes built-in magnifier – scale decals can be applied directly to the tube to support unique flow ranges and units of measure - Optional standard or NRS™ integral needle control valves, as well as flow controllers on the inlet or outlet to go beyond measurement - Integrated alarm option with single or double inductive ring sensor/switch with Intrinsically Safe Relay is ideal for hazardous environments Sho-Rate™ 1250 / 1255 features include: - Two accuracy levels: 5% Full Scale (Model 1250), 3% Full Scale (Model 1255) - Standard direct-read scales for common units and fluids – 65 mm, 150 mm scale lengths (approximate) - Inlet valve and outlet valve with options of cartridge valve, precision control valve or no valve - Easy-change design allows quick interchangeability of tube assemblies - Rotating lens provides a 180° view with magnification Applications - Pharmaceutical production - Research - Chemical manufacturing - Analytical instrumentation - Water treatment and distribution systems Benefits - Options offer value-added features to meet project or OEM requirements - Borosilicate glass is resistant to thermal shock and corrosive gases and fluids - Corrosion-resistant material options for scales, floats, fittings and valves accommodate demanding applications - Integral float stops prevent loss of float during tube removal - Enhance accuracy with easy-to-read scales with magnification - Adjustable alarm guarantees safety and continuous process monitoring Type of Media: Gas / Liquid Flow Measuring Principle: Variable Area (VA) Flow Range: Air: Up to 140 scfh / 63 slpm, Water: Up to 34 gph / 2000 cc/min Accuracy Range: ± 3% - 10% FS Repeatability: 0.25% FS Max Pressure: 200 psi Operating Temperature: 1°C - 121°C Measure/Control: Measure Only (Meter) Max Flow: 425 slpm Max Flow: 424000 sccm Max Flow: 130 l/hr Max Temperature: 121 celsius Max Operating Pressure: 14 bar Accuracy (FS): ±3% FS, ±5% FS, ±10% FS
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