AJA offers HV and UHV magnetron sputtering systems for research scale physical vapor deposition ranging from compact (Orion Series) to complex (ATC Series) to systems for epitaxial film growth by sputtering (SBE Series) plus small batch coaters (Batch Series). These sputtering systems can be configured in either con-focal, normal incidence, off-axis, glancing angle, or combination of target to substrate orientations. Substrate holder features include radiant heating (1000°C), azimuthal rotation, RF/DC biasing, z-motion, cooling (H2O or LN2), tilting, or planetary motion. Compact Systems Price range: $125,000 - $350,000 14" chamber Ø 1”, 1.5", 2" and 3" sputter sources Substrate holders up to 6" Ø Load-lock and cassette options Auto-loading Computer control
