A gantry robot consists of a manipulator mounted onto an overhead system and allows movement across a horizontal plane. ALIO Industries’ Cartesian gantries offer large work areas and superior positioning accuracy, ideal for a range of pick and place applications. Our gantry robots are also known as linear or Cartesian robots and are built with linear guide rails for movement across a horizontal plane. With our gantry systems, programming is simple, and they are not limited by floor space constraints. The SNH-series is a highly configurable gantry robot design based on ALIO’s proven standard stages that can be adapted according to customers’ load, throughput, precision, travel, and budget. Customers may choose from XY travels from as little as 100mm or up to 1m plus and various powerful drive options allowing accelerations of up to 3.5G. With gantries being delivered on rigid base plates like granite, steel or aluminum frames allow superior precision with accuracy of +/- 1.5µm. One key contributor to such high precision is our “Yaw Compliance” option — a virtual rotary axis allowing precise compensation for small angular misalignments that also may be used as an actual rotary axis for small intended angular motions. Combining the gantry with optional degrees of freedom like z-axis, rotary axis, (Inverted) tripods or Hybrid Hexapods® or Gimbals makes this series to one of the most versatile and flexible high precision motion systems in the market. You’ll likely find our gantries in industrial applications like laser machining or additive manufacturing / 3D printing, where an overhead motion is needed as samples can’t be moved or are extremely large. XY Travel: 200mm – 2000mm Acceleration: 1.5 – 3.5 G Linear Resolution: <5nm Bi-Directional Repeatability: Down to +/- 100nm Displacement Accuracy: ~<1.0µm
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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